Au/CaF2/nSi(111) structures with 4–5 monolayers of epitaxial fluoride are fabricated and electrically tested. The leakage current in these structures was substantially smaller than in similar samples reported previously. Simulations adopting a Franz-type dispersion relation with Franz mass of mF1.2m0 for carriers in the forbidden band of CaF2 reproduced the measured current-voltage curves quite satisfactorily. Roughly, these curves could also be reproduced using the parabolic dispersion law with the electron mass of me=1.0m0, which is a material constant rather than a fitting parameter. Experimental facts and their comparison to modeling results allow qualification of the crystalline quality of fabricated structures as sufficient for device applications.

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