Comparison of the $3ω$ method and time-domain thermoreflectance for measurements of the cross-plane thermal conductivity of epitaxial semiconductors Available to Purchase

The $3ω$ technique and time-domain thermoreflectance (TDTR) are two experimental methods capable of measuring the cross-plane thermal conductivity of thin films. We compare the cross-plane thermal conductivity measured by the $3ω$ method and TDTR on epitaxial $(In0.52Al0.48)x(In0.53Ga0.47)1−xAs$ alloy layers with embedded ErAs nanoparticles. Thermal conductivities measured by TDTR at low modulation frequencies $(∼1MHz)$ are typically in good agreement with thermal conductivities measured by the $3ω$ method. We discuss the accuracy and limitations of both methods and provide guidelines for estimating uncertainties for each approach.