The cross-section of the reaction at angles of , , and was measured for incident energies between 3.5 and 6.0 MeV simultaneously with the cross-section of the reaction at . Interference between these two reactions at the angle of and around 3.9 MeV was taken into account. The technique used is very powerful, thanks to the target being implanted with a high dose of nitrogen. The reaction exhibits some resonances allowing traces of nitrogen to be quantified. This reaction also offers an alternative to the and nuclear reactions for profiling nitrogen in the first few microns below the surface. Moreover, by using -particles, Rutherford backscattering spectroscopy can be performed simultaneously with a good mass resolution to depth profile high elements in the sample. The sensitivity of these reactions (0.1%) has been tested by measuring the nitrogen traces in a titanium oxide film deposited on silicon. Depth profiling of nitrogen in a TiN layer on a silicon substrate was also performed. In addition, we publish for the first time some cross-sections values for the reaction at and ; this measurement is a challenging task.
Skip Nav Destination
Research Article| October 28 2008
Cross-section measurements of the and reactions between 3.5 and 6 MeV
G. Terwagne, G. Genard, M. Yedji, G. G. Ross; Cross-section measurements of the and reactions between 3.5 and 6 MeV. J. Appl. Phys. 15 October 2008; 104 (8): 084909. https://doi.org/10.1063/1.3000661
Download citation file: