Tetragonal Nb-doped Pb(Zr0.3Ti0.7)O3 (PNZT) films with a lead oxide seeding layer were deposited on the Pt(111)/Ti/SiO2/Si(100) substrates by sol-gel processing. The as-grown PNZT films with thicknesses ranging from about 0.08 to 0.78μm show highly a-axis preferential orientation, and their ferroelectric and piezoelectric properties improved with increasing film thickness. Due to the combined effects of Nb doping and a-axis texturing as well as reduced substrate constraint, a high d33 constant up to 196 pm/V was obtained for PNZT film at 0.78μm in addition to a large remnant polarization of 69μC/cm2. This well a-axis-oriented PNZT films on platinized Si with a high piezoresponse are suitable for the fabrication of microelectromechanical devices.

1.
Z. J.
Wang
,
H.
Kokawa
, and
R.
Maeda
,
Acta Mater.
53
,
593
(
2005
).
2.
D.
Akai
,
Appl. Phys. Lett.
86
,
202906
(
2005
).
3.
D. L.
Polla
and
L. F.
Francis
,
Annu. Rev. Mater. Sci.
28
,
563
(
1998
).
4.
S. Y.
Chen
and
C. L.
Sun
,
J. Appl. Phys.
90
,
2970
(
2001
).
5.
W.
Gong
,
J. -F.
Li
,
X. C.
Chu
,
Z. L.
Gui
, and
L. T.
Li
,
Acta Mater.
52
,
2787
(
2004
).
6.
Z. -X.
Zhu
,
J. -F.
Li
,
F. -P.
Lai
,
Y. H.
Zhen
,
Y. -H.
Lin
,
C. -W.
Nan
,
L. -T.
Li
, and
J. Y.
Li
,
Appl. Phys. Lett.
91
,
222910
(
2007
).
7.
G. Y.
Yang
,
J. M.
Finder
,
J.
Wang
,
Z. L.
Wang
,
Z.
Yu
,
J.
Ramdani
,
R.
Droopad
,
K. W.
Eisenbeiser
, and
R.
Ramesh
,
J. Mater. Res.
17
,
204
(
2002
).
8.
B.
Jaffe
,
W. R.
Cook
, Jr.
, and
H.
Jaffe
,
Piezoelectric Ceramics
(
Academic
,
New York
,
1971
).
9.
K. W.
Kwok
,
R. C. W.
Tsang
,
H. L. W.
Chan
, and
C. L.
Choy
,
J. Appl. Phys.
95
,
1372
(
2004
).
10.
W.
Gong
,
J. -F.
Li
,
X. C.
Chu
,
Z. L.
Gui
, and
L. T.
Li
,
Appl. Phys. Lett.
85
,
3818
(
2004
).
11.
W.
Gong
,
J. -F.
Li
,
X. C.
Chu
,
Z. L.
Gui
, and
L. T.
Li
,
J. Appl. Phys.
96
,
590
(
2004
).
12.
C. R.
Cho
,
W. J.
Lee
,
B. G.
Yu
, and
B. W.
Kim
,
J. Appl. Phys.
86
,
2700
(
1999
).
13.
T.
Sakoda
,
K.
Aoki
, and
Y.
Fukuda
,
Jpn. J. Appl. Phys., Part 1
38
,
3600
(
1999
).
14.
H.
Morioka
,
G.
Asano
,
T.
Oikawa
,
H.
Funakubo
, and
K.
Saito
,
Appl. Phys. Lett.
82
,
4761
(
2003
).
15.
D. -J.
Kim
,
J. -P.
Maria
,
A. I.
Kingon
, and
S. K.
Streiffer
,
J. Appl. Phys.
93
,
5568
(
2003
).
16.
T.
Haccart
,
D.
Remiens
, and
E.
Cattan
,
Thin Solid Films
423
,
235
(
2003
).
17.
D. M.
Kim
,
C. B.
Eom
,
V.
Nagarajan
,
J.
Ouyang
,
R.
Ramesh
,
V.
Vaithyanathan
, and
D. G.
Schlom
,
Appl. Phys. Lett.
88
,
142904
(
2006
).
18.
V.
Nagarajan
,
A.
Roytburd
,
A.
Stanishevsky
,
S.
Prasertchoung
,
T.
Zhao
,
L.
Chen
,
J.
Melngailis
,
O.
Aucielllo
, and
R.
Ramesh
,
Nat. Mater.
2
,
43
(
2003
).
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