The spectra of optical constants, index of refraction , and extinction coefficient of graphene and graphite are obtained in the wavelength range of 190–1000 nm (6.53–1.24 eV) using broadband optical spectrophotometry in conjunction with the Forouhi–Bloomer dispersion relations for and . Measurement is made possible by the use of a multilayer substrate consisting of bulk Si and a film. The effect of multiple internal reflections between the and /graphene interfaces amplifies the attenuating effect of the graphene layer, thereby improving the sensitivity of the reflectance measurement by a factor of 27 in the deep ultraviolet region of the spectrum. Maximum sensitivity is observed in the deep ultraviolet region of the spectrum, where a strong peak in the spectrum of the extinction coefficient of graphene is identified. The proposed method enables fast nondestructive angstrom-level thickness measurements of graphene and graphite. In this work, layers ranging in thickness between (graphene) and are detected, measured, and characterized. Reflectance spectra of graphene and graphite on Ni, Co, and Fe substrates are calculated. Differences of 1.1%–2.0% between the bare substrate and the graphene on the substrate are predicted in the deep ultraviolet region of the spectrum, which makes graphene detectable and measurable on these substrates.
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1 September 2008
Research Article|
September 04 2008
Optical detection and characterization of graphene by broadband spectrophotometry
Alexander Gray;
Alexander Gray
a)
1Department of Physics,
University of California
, Davis, California 95616, USA
2
n&k Technology, Inc.
, 80 Las Colinas Lane, San Jose, California 95119, USA
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Mehdi Balooch;
Mehdi Balooch
b)
2
n&k Technology, Inc.
, 80 Las Colinas Lane, San Jose, California 95119, USA
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Stephane Allegret;
Stephane Allegret
3
STMicroelectronics
, 850 Rue Jean Monnet, 38926 Crolles Cedex, France
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Stefan De Gendt;
Stefan De Gendt
4
Interuniversity Microelectronics Center (IMEC vzw)
, Kapeldreef 75, 3001 Leuven, Belgium
5Department of Chemistry,
KULeuven
, Celestijnenlaan 200F, B-3001 Leuven, Belgium
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Wei-E Wang
Wei-E Wang
6
Intel Corp. c/o IMEC
, Kapeldreef 75, B-3001 Leuven, Belgium
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a)
Author to whom correspondence should be addressed. Electronic mail: agray@ucdavis.edu.
b)
Present address: Nuclear Engineering Department, University of California, Berkeley, CA 94720.
J. Appl. Phys. 104, 053109 (2008)
Article history
Received:
February 09 2008
Accepted:
July 01 2008
Citation
Alexander Gray, Mehdi Balooch, Stephane Allegret, Stefan De Gendt, Wei-E Wang; Optical detection and characterization of graphene by broadband spectrophotometry. J. Appl. Phys. 1 September 2008; 104 (5): 053109. https://doi.org/10.1063/1.2974096
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