The heterogeneous integration of a III–V thin film on top of a silicon-on-insulator (SOI) optical waveguide circuit by means of adhesive divinylsiloxane-benzocyclobutene (DVS-BCB) die-to-wafer bonding is demonstrated, thereby achieving light emission and enhanced nonlinearity in ultracompact SOI cavities. This approach requires ultrathin DVS-BCB bonding layers to allow the highly confined optical mode to overlap with the bonded III–V film. The transfer of sub-100-nm III–V layers using a 65 nm DVS-BCB bonding layer onto SOI racetrack resonator structures is demonstrated. Spontaneous emission coupled to a SOI bus waveguide, spectrally centered around the resonator resonances, is observed by optically pumping the III–V layer. Strong carrier-induced nonlinearities are observed in the transmission characteristics of the III–V/SOI resonator structure. The all-optical control of an optical signal in these III–V/SOI resonators is demonstrated.
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1 August 2008
Research Article|
August 15 2008
Light emission and enhanced nonlinearity in nanophotonic waveguide circuits by III–V/silicon-on-insulator heterogeneous integration
G. Roelkens;
G. Roelkens
a)
1Photonics Research Group (INTEC),
Ghent University-IMEC
, Sint-Pietersnieuwstraat 41, Ghent B-9000, Belgium
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L. Liu;
L. Liu
1Photonics Research Group (INTEC),
Ghent University-IMEC
, Sint-Pietersnieuwstraat 41, Ghent B-9000, Belgium
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D. Van Thourhout;
D. Van Thourhout
1Photonics Research Group (INTEC),
Ghent University-IMEC
, Sint-Pietersnieuwstraat 41, Ghent B-9000, Belgium
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R. Baets;
R. Baets
1Photonics Research Group (INTEC),
Ghent University-IMEC
, Sint-Pietersnieuwstraat 41, Ghent B-9000, Belgium
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R. Nötzel;
R. Nötzel
2OED Group,
Technical University Eindhoven
, Den Dolech 2, Eindhoven 5600 MB, The Netherlands
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F. Raineri;
F. Raineri
3
Laboratoire de Photonique et de Nanostructures
, CNRS UPR20, Route de Nozay, Marcoussis 91460, France
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I. Sagnes;
I. Sagnes
3
Laboratoire de Photonique et de Nanostructures
, CNRS UPR20, Route de Nozay, Marcoussis 91460, France
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G. Beaudoin;
G. Beaudoin
3
Laboratoire de Photonique et de Nanostructures
, CNRS UPR20, Route de Nozay, Marcoussis 91460, France
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R. Raj
R. Raj
3
Laboratoire de Photonique et de Nanostructures
, CNRS UPR20, Route de Nozay, Marcoussis 91460, France
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a)
Electronic mail: gunther.roelkens@intec.ugent.be.
J. Appl. Phys. 104, 033117 (2008)
Article history
Received:
April 29 2008
Accepted:
June 11 2008
Citation
G. Roelkens, L. Liu, D. Van Thourhout, R. Baets, R. Nötzel, F. Raineri, I. Sagnes, G. Beaudoin, R. Raj; Light emission and enhanced nonlinearity in nanophotonic waveguide circuits by III–V/silicon-on-insulator heterogeneous integration. J. Appl. Phys. 1 August 2008; 104 (3): 033117. https://doi.org/10.1063/1.2967832
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