The thin film system has been studied using transmission electron microscopy (TEM). The thin films of were grown by pulsed laser deposition onto single crystal and sintered polycrystalline substrates at room temperature (RT) and and subjected to annealing for various periods of time at . TEM characterization showed that the morphology of the film varied with changes of deposition temperature. Films deposited at RT featured a columnar structure and those deposited at showed layers with crystalline grains. The interfacial structures of the films remained unchanged below . Interfacial reactions were observed following annealing at for 5 h. The phase transformation at the interface was characterized for the film annealed at for 5 h, for which the principal phases were identified as and . Evaluation for thin film conductometric sensing applications indicated that the untreated films deposited at onto both single crystal and sintered substrates exhibited a -type gas sensor response to oxygen at .
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15 July 2008
Research Article|
July 28 2008
Thermal stability of thin films: Transmission electron microscopy study and conductometric sensing response Available to Purchase
Dashan Wang;
Dashan Wang
a)
1Institute for Chemical Process and Environmental Technology,
National Research Council of Canada
, Montreal Road, Ottawa, Ontario K1A 0R6, Canada
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James J. Tunney;
James J. Tunney
1Institute for Chemical Process and Environmental Technology,
National Research Council of Canada
, Montreal Road, Ottawa, Ontario K1A 0R6, Canada
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Xiaomei Du;
Xiaomei Du
1Institute for Chemical Process and Environmental Technology,
National Research Council of Canada
, Montreal Road, Ottawa, Ontario K1A 0R6, Canada
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Michael L. Post;
Michael L. Post
1Institute for Chemical Process and Environmental Technology,
National Research Council of Canada
, Montreal Road, Ottawa, Ontario K1A 0R6, Canada
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Raynald Gauvin
Raynald Gauvin
2Department of Mining, Metallurgy and Materials Engineering,
McGill University
, Montreal, Quebec H3A 2B2, Canada
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Dashan Wang
1,a)
James J. Tunney
1
Xiaomei Du
1
Michael L. Post
1
Raynald Gauvin
2
1Institute for Chemical Process and Environmental Technology,
National Research Council of Canada
, Montreal Road, Ottawa, Ontario K1A 0R6, Canada
2Department of Mining, Metallurgy and Materials Engineering,
McGill University
, Montreal, Quebec H3A 2B2, Canada
a)
aElectronic mail: [email protected].
J. Appl. Phys. 104, 023530 (2008)
Article history
Received:
April 10 2008
Accepted:
May 16 2008
Citation
Dashan Wang, James J. Tunney, Xiaomei Du, Michael L. Post, Raynald Gauvin; Thermal stability of thin films: Transmission electron microscopy study and conductometric sensing response. J. Appl. Phys. 15 July 2008; 104 (2): 023530. https://doi.org/10.1063/1.2957073
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