Electrical properties, i.e., dielectric hysteresis and leakage current, of epitaxial films with bottom electrode and different metals as top contact were investigated. The leakage current is largely insensitive to the work function of the top metal but increases with decreasing electronegativity as well as with decreasing number of electrons on the -shell of the top metal. The best rectifying properties are obtained for metals with complete -shell (Cu, Au, Ag, Pd), while the metals with few electrons on the -shell (Ta, Cr) form Ohmic-like contacts.
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