The structure of nitride containing gold films produced by reactive ion sputtering and nitrogen plasma etching is investigated using x-ray photoelectron spectroscopy and x-ray diffraction. It is found that gold nitride is a solid solution of nitrogen atoms dissolved in a fcc gold matrix. Differences between the strain and lattice parameters of gold and gold nitride films were observed and are explained by interstitial nitrogen present in the latter.
REFERENCES
1.
2.
3.
L.
Šiller
, M. R. C.
Hunt
, J. W.
Brown
, J. -M.
Coquel
, and P.
Rudolf
, Surf. Sci.
513
, 78
(2002
).4.
L.
Šiller
, N.
Peltekis
, S.
Krishnamurthy
, Y.
Chao
, S. J.
Bull
, and M. R. C.
Hunt
, Appl. Phys. Lett.
86
, 221912
(2005
).5.
A. P.
Caricato
, M.
Fernàndez
, G.
Leggieri
, A.
Luches
, M.
Martino
, F.
Romano
, T.
Tunno
, D.
Valerini
, A.
Verdyan
, Y. M.
Soifer
, J.
Azoulay
, and L.
Meda
, Appl. Surf. Sci.
253
, 8037
(2007
).6.
A.
Devia
, H. A.
Castillo
, V. J.
Benavides
, Y. C.
Arango
, and J. H.
Quintero
, Mater. Charact.
59
, 105
(2008
).7.
S.
Krishnamurthy
, M.
Montalti
, M. G.
Wardle
, M. J.
Shaw
, P. R.
Briddon
, K.
Svensson
, M. R. C.
Hunt
, and L.
Šiller
, Phys. Rev. B
70
, 045414
(2004
).8.
R.
Yu
and X. F.
Zhang
, Phys. Rev. B
72
, 054103
(2005
).9.
M. B.
Kanoun
and S.
Goumri-Said
, Phys. Lett. A
362
, 73
(2007
).10.
Yu. V.
Butenko
, L.
Alves
, A. C.
Brieva
, J.
Yang
, S.
Krishnamurthy
, and L.
Šiller
, Chem. Phys. Lett.
430
, 89
(2006
).11.
J. J.
Yeh
and I.
Lindau
, At. Data Nucl. Data Tables
32
, 1
(1985
).12.
A.
Munitz
, G.
Kimmel
, J. C.
Rawers
, and R. J.
Fields
, Nanostruct. Mater.
8
, 867
(1997
).13.
G. K.
Williamson
and W. H.
Hall
, Acta Metall.
1
, 22
(1953
).14.
T.
Ungár
, A.
Révésez
, and A.
Borbély
, J. Appl. Crystallogr.
31
, 554
(1998
).15.
Hydrogen in Metals I and II
, edited by G.
Alefeld
and J.
Völkl
(Springer-Verlag
, Berlin
, 1978
).16.
B.
Baranowski
, S.
Majchrzak
, and T. B.
Flanagan
, J. Phys. F: Met. Phys.
1
, 258
(1971
).17.
M.
Beck
, M.
Ellner
, and E. J.
Mittemeijer
, Acta Mater.
49
, 985
(2001
).18.
Resonant Anomalous X-Ray Scattering: Theory and Applications
, edited by G.
Materlik
, C. J.
Sparks
, and K.
Fischer
(North-Holland
, Amsterdam
, 1994
), pp. 389
–420
.© 2008 American Institute of Physics.
2008
American Institute of Physics
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