We report on the fabrication of hollow and sandwiched nanoparticles by ion irradiation. Ag nanoparticles embedded in silica were irradiated by N+, Si+, Ar+, and Cu+ ions at 300keV to a fluence of 5×1016ionscm2, by Cu+ ions at varying energies from 110to500keV to a fluence of 5×1016ionscm2, and by Cu+ ions at 400keV to fluences varied from 1×1016to1×1017ionscm2. The size of the irradiation-induced nanovoids increases with increasing ion mass and energy. The formation of nanovoids depends on the electronic and nuclear energy loss of the irradiation ions. The formation of irradiation-induced sandwiched nanoparticles is because of the capture of knocked-out Ag atoms from nanoshells by nanovoids. The size of the inner nanoparticles within the sandwiched structure increases with increasing fluence.

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