The interface properties of thin Gd2O3 films grown on Ge(001) are studied as a function of the oxidizing species used during the deposition. The mediation of molecular oxygen during growth produces a crystalline oxide with an atomically sharp and contamination-free interface on the Ge substrate. Conversely, an interface layer of substoichiometric germanium oxide occurs whenever atomic oxygen radicals are used. The two different Gd2O3Ge interfacial configurations are discussed basing on thermodynamic arguments.

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