The damage kinetics induced by irradiation with a diversity of swift ions (O at ; F at ; Si at 5, 7.5, and ; and Cl at 11 and ) has been investigated in the range of . It covers from the initial stage where single damage tracks are isolated and well separated, up to the stage where a full amorphous layer is produced. The damage is characterized by the areal fraction of disorder derived from the Rutherford backscattering∕channeling spectra. The data approximately fit an abrupt Avrami-type dependence with fluence. The fluence value at which 50% of the sample surface becomes disordered shows a clear increasing trend with the electronic stopping power of the ion. The trend is consistent with Monte Carlo simulations based on a recent model for defect creation. Moreover, the quantitative agreement for the defect generation rate appears also reasonable.
Skip Nav Destination
Research Article| April 17 2007
Kinetics of ion-beam damage in lithium niobate
A. García-Navarro, F. Agulló-López, M. Bianconi, J. Olivares, G. García; Kinetics of ion-beam damage in lithium niobate. J. Appl. Phys. 15 April 2007; 101 (8): 083506. https://doi.org/10.1063/1.2714772
Download citation file: