Transition from tungsten erosion to carbon layer deposition with simultaneous bombardment of tungsten by helium and carbon

Simultaneous bombardment of tungsten layers with helium and carbon ions leads to both erosion of tungsten and implantation of carbon. The underlying processes have been investigated numerically and experimentally as a function of the carbon fraction in the incident ion flux for ion energies in the kilo electron volt range. Tungsten layers were deposited on polished single-crystal silicon substrate by magnetron sputter deposition to eliminate the influence of surface roughness on the experimental results. The fluence-dependent dynamics of the surface composition was measured in situ by ion beam analysis. The given projectile-target system is subject only to kinematic processes, and is therefore particularly suitable for benchmarking of purely kinematic simulations based on the binary-collision approximation, as implemented in the TRIDYN code. TRIDYN calculations match the experimental results very well, which demonstrates the validity of the kinematic description. In particular, the simulations allow us to predict the change of surface composition by bombardment with gaseous and nonvolatile ions, as well as the transition point from W erosion to C deposition as function of the carbon fraction in the incident ion flux.