The optical properties of amorphous beryllium nitride thin films deposited on Si (100) at temperature using reactive rf sputtering deposition were examined in the wavelength range of . X-ray diffraction of the films showed no structure, suggesting the films grown on the Si (100) substrates are amorphous. The thicknesses and optical constants of the films were derived from variable-angle spectroscopic ellipsometry measurements using the Cauchy-Urbach model. Refractive indices and extinction coefficients of the films were determined to be in the range and , respectively. Analysis of the absorption coefficient shows the optical absorption edge of films to be . These values were in excellent agreement with the photoluminescence measurements . The surface morphology was characterized by atomic force microscopy. The surfaces of the films were very smooth and their average roughnesses were measured to be in the range of . An effective medium approximation model of 50% and 50% voids was used in the ellipsometric fitting procedure. The spectral dependence of transmissivity of the films was investigated at different angles of incidence (20°–80°). The films shown high transmissivity (80%–99%) in the visible and near infrared regions.
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15 May 2007
Research Article|
May 30 2007
Optical properties of sputtered amorphous beryllium nitride thin films Available to Purchase
J. M. Khoshman;
J. M. Khoshman
a)
Department of Physics,
Al-Hussein Bin Talal University
, Ma’an, Jordan
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A. Khan;
A. Khan
Department of Physics and Astronomy,
Ohio University
, Athens, Ohio 45701
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M. E. Kordesch
M. E. Kordesch
Department of Physics and Astronomy,
Ohio University
, Athens, Ohio 45701
Search for other works by this author on:
J. M. Khoshman
a)
Department of Physics,
Al-Hussein Bin Talal University
, Ma’an, Jordan
A. Khan
Department of Physics and Astronomy,
Ohio University
, Athens, Ohio 45701
M. E. Kordesch
Department of Physics and Astronomy,
Ohio University
, Athens, Ohio 45701a)
Author to whom correspondence should be addressed; electronic mail: [email protected]
J. Appl. Phys. 101, 103532 (2007)
Article history
Received:
December 21 2006
Accepted:
April 03 2007
Citation
J. M. Khoshman, A. Khan, M. E. Kordesch; Optical properties of sputtered amorphous beryllium nitride thin films. J. Appl. Phys. 15 May 2007; 101 (10): 103532. https://doi.org/10.1063/1.2738393
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