We demonstrate that the chemical composition of the sputtered CuCl thin films could be finely controlled by adjusting the bias to the substrate. The films deposited without any intentional bias were Cl rich , a bias of yielded stoichiometric CuCl, and a further increase in the negative bias resulted in Cl deficient films . The crystalline and optical properties were found to be associated with the chemical composition. Cl rich films showed a deep level green emission at around in addition to ultraviolet (UV) excitonic emission. The stoichiometric films have higher optical quality, exhibiting a sharp UV emission at around at room temperature, compared to nonstoichiometric samples. Visible luminescence related to deep level defects was not observed in the stoichiometric films. Changes in energy of the flux from the target and the subsequent ion bombardment on the substrate surface are correlated with the variations in chemical composition and their impact on the film microstructure and UV emission.
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1 November 2006
Rapid Communication|
November 09 2006
Stoichiometry control of sputtered CuCl thin films: Influence on ultraviolet emission properties
Gomathi Natarajan;
Gomathi Natarajan
a)
Nanomaterials Processing Laboratory (NPL), NCPST, School of Electronic Engineering,
Dublin City University
, Dublin-9, Ireland
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R. T. Rajendra Kumar;
R. T. Rajendra Kumar
School of Physical Sciences, NCPST,
Dublin City University
, Dublin-9, Ireland
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S. Daniels;
S. Daniels
Nanomaterials Processing Laboratory (NPL), NCPST, School of Electronic Engineering,
Dublin City University
, Dublin-9, Ireland
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D. C. Cameron;
D. C. Cameron
Advanced Surface Technology Research Laboratory (ASTRaL),
Lappeenranta University of Technology
, 50101 Mikkeli, Finland
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P. J. McNally
P. J. McNally
Nanomaterials Processing Laboratory (NPL), RINCE, School of Electronic Engineering,
Dublin City University
, Dublin-9, Ireland
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a)
Electronic mails: gomathi.natarajan2@mail.dcu.ie and gomathinatarajan@yahoo.com
J. Appl. Phys. 100, 096108 (2006)
Article history
Received:
June 20 2006
Accepted:
August 21 2006
Citation
Gomathi Natarajan, R. T. Rajendra Kumar, S. Daniels, D. C. Cameron, P. J. McNally; Stoichiometry control of sputtered CuCl thin films: Influence on ultraviolet emission properties. J. Appl. Phys. 1 November 2006; 100 (9): 096108. https://doi.org/10.1063/1.2364665
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