The planar and channel waveguides in z-cut LiNbO3 crystals have been fabricated by multienergy (2.2+1.8+1.6MeV) oxygen ion implantation to a total dose of 6×1014ionscm2 at room temperature, followed by a thermal anneal at 260°C for 30min in dry oxygen atmosphere. The image and optical intensity distribution of the light in the waveguides were obtained by an end-fire coupling method. The guiding modes of the planar waveguides were measured by the prism-coupling method at 633nm. The Rutherford backscattering/channeling technique was used to investigate the damage induced by oxygen ions after annealing treatment; the minimum yield of the spectra was 4.5%.

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