A self‐consistent particle‐in‐cell (PIC) simulation method for solving fluid equations, coupled with Poisson’s equation, has been developed for parallel plate radio‐frequency (rf) glow discharges. Using the PIC transport method preserves the steep and changing gradients of moments in the sheath region; therefore, the PIC method solves fluid equations for rf discharges more accurately than the other methods with numerical diffusion. However, the particle method requires a sufficient number of particles to achieve an accurate result. A memory bank is designed to store the electron and ion particle information efficiently. Although the memory size is limited by the computer hardware, renormalization can resolve the memory consumption problem caused by the increase of the secondary electrons that flow into the reactor from the electrodes. Moreover, renormalization solves the discontinuous ion density distribution problem caused by the decrease of the sheath ions that flow out of the electrodes. Due to the use of a finite number of particles, fluctuation of the convergence ratio is another problem with the particle method. The simulation convergence ratio affected by the number of superparticles, the applied field, the secondary electron emission coefficient, and renormalization are discussed. The simulation results of the PIC/fluid model agree well with experiment data.
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Research Article| May 01 1993
A particle‐in‐cell fluid model for radio frequency glow discharges
Chihwen ‘‘Chris’’ Li;
Chihwen ‘‘Chris’’ Li, Chwan‐Hwa ‘‘John’’ Wu; A particle‐in‐cell fluid model for radio frequency glow discharges. Comput. Phys. 1 May 1993; 7 (3): 363–375. https://doi.org/10.1063/1.168465
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