We investigated here the influence of the lateral and normal Casimir force on the actuation dynamics between sinusoidal corrugated surfaces undergoing both normal and lateral displacements. The calculations were performed for topological insulators and phase change materials that are of high interest for device applications. The results show that the lateral Casimir force becomes stronger by increasing the material conductivity and the corrugations toward similar sizes producing wider normal separation changes during lateral motion. In a conservative system, bifurcation and Poincaré portrait analysis shows that larger but similar in size corrugations and/or higher material conductivity favor stable motion along the lateral direction. However, in the normal direction, the system shows higher sensitivity on the optical properties for similar in size corrugations leading to reduced stable operation for higher material conductivity. Furthermore, in non-conservative systems, the Melnikov function with the Poincaré portrait analysis was combined to probe the possible occurrence of chaotic motion. During lateral actuation, systems with more conductive materials and/or the same but high corrugations exhibit lower possibility for chaotic motion. By contrast, during normal motion, chaotic behavior leading to stiction of the moving components is more likely to occur for systems with more conductive materials and similar in magnitude corrugations.

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