In this era of the Internet of Things, the development of innovative sensors has rapidly accelerated with that of nanotechnology to accommodate various demands for smart applications. The practical use of three-dimensional (3D) nanostructured materials breaks several limitations of conventional sensors, including the large surface-to-volume ratio, precisely tunable pore size and porosity, and efficient signal transduction of 3D geometries. This review provides an in-depth discussion on recent advances in chemical and mechanical sensors based on 3D nanostructures, which are rationally designed and manufactured by advanced 3D nanofabrication techniques that consider structural factors (e.g., porosity, periodicity, and connectivity). In particular, we focus on a proximity-field nanopatterning technique that specializes in the production of periodic porous 3D nanostructures that satisfy the structural properties universally required to improve the performance of various sensor systems. State-of-the-art demonstrations of high-performance sensor devices such as supersensitive gas sensors and wearable strain sensors realized through designed 3D nanostructures are summarized. Finally, challenges and outlooks related to nanostructures and nanofabrication for the practical application of 3D nanostructure-based sensor systems are proposed.
Skip Nav Destination
Proximity-field nanopatterning for high-performance chemical and mechanical sensor applications based on 3D nanostructures
Article navigation
March 2022
Review Article|
March 29 2022
Proximity-field nanopatterning for high-performance chemical and mechanical sensor applications based on 3D nanostructures
Jinho Lee;
Jinho Lee
1
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
, Daejeon 34141, South Korea
Search for other works by this author on:
Donghwi Cho
;
Donghwi Cho
2
Thin Film Materials Research Center, Korea Research Institute of Chemical Technology
, Yuseong, Daejeon 34114, South Korea
Search for other works by this author on:
Haomin Chen
;
Haomin Chen
1
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
, Daejeon 34141, South Korea
3
Department of Mechanical and Aerospace Engineering, The Hong Kong University of Science and Technology
, Clear Water Bay, Kowloon, Hong Kong, People's Republic of China
Search for other works by this author on:
Young-Seok Shim;
Young-Seok Shim
a)
4
Division of Materials Science and Engineering, Silla University
, Busan 46958, South Korea
a)Authors to whom correspondence should be addressed: ysshim@silla.ac.kr; jpark@kumoh.ac.kr; and jeon39@kaist.ac.kr
Search for other works by this author on:
Junyong Park
;
Junyong Park
a)
5
School of Materials Science and Engineering, Department of Energy Engineering Convergence, Kumoh National Institute of Technology
, Gumi, Gyeongbuk 39177, South Korea
a)Authors to whom correspondence should be addressed: ysshim@silla.ac.kr; jpark@kumoh.ac.kr; and jeon39@kaist.ac.kr
Search for other works by this author on:
Seokwoo Jeon
Seokwoo Jeon
a)
1
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
, Daejeon 34141, South Korea
a)Authors to whom correspondence should be addressed: ysshim@silla.ac.kr; jpark@kumoh.ac.kr; and jeon39@kaist.ac.kr
Search for other works by this author on:
a)Authors to whom correspondence should be addressed: ysshim@silla.ac.kr; jpark@kumoh.ac.kr; and jeon39@kaist.ac.kr
Appl. Phys. Rev. 9, 011322 (2022)
Article history
Received:
December 07 2021
Accepted:
March 07 2022
Citation
Jinho Lee, Donghwi Cho, Haomin Chen, Young-Seok Shim, Junyong Park, Seokwoo Jeon; Proximity-field nanopatterning for high-performance chemical and mechanical sensor applications based on 3D nanostructures. Appl. Phys. Rev. 1 March 2022; 9 (1): 011322. https://doi.org/10.1063/5.0081197
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Could not validate captcha. Please try again.
Sign in via your Institution
Sign in via your InstitutionPay-Per-View Access
$40.00
Citing articles via
Related Content
Energy Transfer in the Photo‐Sensitization of Silver Halide Photographic Emulsions: Optical Sensitization, Supersensitization, and Antisensitization
J. Chem. Phys. (December 2004)
Elucidation by electron spin resonance and optical spectroscopy of the supersensitization mechanism in a red-sensitive AgCl-based photographic emulsion
J. Appl. Phys. (September 2004)
Spectral Sensitization, Supersensitization, and the Mechanism(s) of Dye‐Sensitized Photoconductivity in AgBr Single Crystals
J. Chem. Phys. (December 2003)