The creation of van der Waals (vdW) ferromagnets with tunable Curie temperature (TC) and magnetic anisotropy is essential in developing vdW magnet-based devices. Here, we report an effective and reliable method for modulating the magnetic properties of vdW Fe5GeTe2 by site-specific Ga+ implantation. In this study, we report an easy axis in the ab-plane for bulk Fe5GeTe2 (TC = 310 K) and an axis out of the plane for thin Fe5GeTe2 flakes (TC = 290 K). Combining element-resolved photoemission electron microscopy and spatially resolved magneto-optic Kerr microscopy, we find that the implantation of a tiny amount of 10−3 Ga+·Å−3 in Fe5GeTe2 greatly enhances the TC from 290 to 360 K and switches the magnetic easy axis from the out-of-plane c axis to the ab-plane. The room-temperature x-ray magnetic circular dichroism signal is enhanced from 0% to 9% at an implantation level of 10−2 Ga+·Å−3. These results provide new opportunities for tailoring the magnetic properties of vdW materials beyond room temperature.

The recent discovery of two-dimensional (2D) magnetism within the family of exfoliative van der Waals (vdW) materials1,2 has attracted tremendous attention in both fundamental and applied research. In particular, there has been an upsurging enthusiasm for enhancing the Curie temperature (TC) of vdW magnets well above room temperature (RT) and modulating their magnetic properties.3 Among the prominent bulk vdW materials used to study quasi-2D magnetism, the FenGeTe2 family has stood out due to its high TC, stability, and large saturation magnetization, making it a promising candidate for manipulating magnetic anisotropy and spin textures. Specifically, bulk Fe3GeTe2 (Fe3GT) has a TC of 220–230 K with a saturation magnetization of ∼376 emu/cm3,4–7 and bulk FenGeTe2 (n = 4, 5) has a TC ranging from 270 to 330 K with a saturation magnetization of 500–640 emu/cm3.8–13 While Fe3GT is an itinerant ferromagnet with weakly bonded Fe3Ge layers (Fe atoms occupying two inequivalent Fe1 and Fe2) that alternate between two Te layers,4–7 the Fe-rich Fe5GeTe2 (Fe5GT) has a covalently bonded Fe5Ge slab [Fig. 1(a), Fe atoms occupying three inequivalent Fe1, Fe2, and Fe3 sites] sandwiched between two Te layers, which could introduce more complex magnetic orders.8–12 Rich phenomena regarding different orientations of easy axis,12,14 the temperature-dependent magnetic phases,8,11–13 and the thickness-dependent spin reorientation transitions15–18 in Fe5GT have been reported.

FIG. 1.

Characterization of bulk Fe5GT. (a) Schematic drawing of the crystal structure of Fe5GT in side view and top view. (b) M–T curve of bulk Fe5GT crystal. The inset derivative curve shows the Curie temperature. (c) Hysteresis loops with a magnetic field along the in-plane and out-of-plane directions at various temperatures across the TC. (d) FMR spectra with a magnetic field along the in-plane direction at different frequencies at RT. The dashed lines are guidelines to show the resonance field shifts. (e) Resonance fields and (f) linewidth as a function of frequency. The solid lines are fitting curves with Eqs. (1) and (2), respectively.

FIG. 1.

Characterization of bulk Fe5GT. (a) Schematic drawing of the crystal structure of Fe5GT in side view and top view. (b) M–T curve of bulk Fe5GT crystal. The inset derivative curve shows the Curie temperature. (c) Hysteresis loops with a magnetic field along the in-plane and out-of-plane directions at various temperatures across the TC. (d) FMR spectra with a magnetic field along the in-plane direction at different frequencies at RT. The dashed lines are guidelines to show the resonance field shifts. (e) Resonance fields and (f) linewidth as a function of frequency. The solid lines are fitting curves with Eqs. (1) and (2), respectively.

Close modal

Various methods have been shown to increase the TC and modulate the magnetic properties of FenGeTe2 vdW materials.19 The application of high pressure20 and tensile strain,21 which could change the bond length or bond angles between ions and the lattice constants, dramatically increased the TC and changed the magnetic anisotropy energy. The interlayer coupling or interfacial exchange coupling of a Fe3GT layer with an ferromagnetic (FM)22 or a topological insulator layer23 also showed the enhancement of TC to room temperature (RT). By cobalt or nickel substitution of Fe5GT, i.e., (Fe1−xCox)5GeTe224–26 or (Fe1−xNix)5GeTe2,27 the magnetic ordering temperature was further increased to ∼360 and ∼480 K, respectively. More interestingly, the layered magnets showed an extremely sensitive response to the intercalation of foreign atoms into the vdW gaps, which could efficiently modulate the interlayer distance and the interlayer exchange coupling strength J. Intercalation of Li+ via an ionic gate in atomically thin Fe3GT28 was shown to enhance TC up to RT and to modulate magnetic anisotropy in vdW Fe5GT. Apart from the Li+-intercalation method for J modulation, the proton intercalation in Fe3GT and Fe5GT induced a gate-controlled FM-atomic force microscopy (AFM) phase transition14 and a zero-field cooled large exchange bias,29 respectively. Meanwhile, we noticed that by intercalation of sodium in Fe3GT30 or arsenic substitution for Ge in Fe5GT,31 the TC was enhanced with a modified crystal structure and magnetic anisotropy. Our previous studies reported that through tiny implantation of Ga+ into microstructure-patterned Fe3GT flakes, the TC was enhanced by almost 100% (from 230 to 450 K), with the magnetic anisotropy changing from out-of-plane at low temperature to in-plane at RT.32,33 Thus, this proved to be an effective and reliable method of tuning the TC and magnetic anisotropy of vdW magnets by controlling the fluence of Ga irradiation without the need for a special sample growth recipe24–27,31 or particular device geometry,28–30 as mentioned in previous reports. In this work, we report on the enhancement of TC and the modulation of magnetic anisotropy in the newly synthesized vdW Fe5GT material through the implantation of Ga ions with site-specific capabilities using unique element-resolved photoemission electron microscopy and spatially resolved Kerr microscopy.

A flat Fe5GT single crystal was used to investigate macroscopic magnetization through vibrating sample magnetometry (VSM). The temperature dependence of the magnetization was obtained with a 0.2 T magnetic field applied along the in-plane direction after the zero-field cooling process. The magnetization decreases with increasing temperature and has a sharp transition at ∼310 K, indicating a ferromagnetic (FM) to paramagnetic (PM) phase transition (i.e., TC ∼ 310 K) for the bulk Fe5GT crystals [Fig. 1(b)], which is further confirmed by the differential curve, as shown in the inset of Fig. 1(b). The temperature-dependent hysteresis loops of the Fe5GT crystal [Fig. 1(c)] were measured with a magnetic field along both the out-of-plane (H//c) and in-plane directions (H//ab). We found that the saturation field for the in-plane hysteresis loop is always smaller than that for the out-of-plane hysteresis loop at T < TC, showing that the magnetic easy axis is along the in-plane direction for bulk Fe5GT crystals within the studied temperature range of 100–310 K, which is consistent with previous reports.8,10–12

Further characterization of bulk Fe5GT occurs through ferromagnetic resonance (FMR) measurements, which detect magnetization dynamics for bulk Fe5GT crystals (see Sec. I of the supplementary material). Figure 1(d) shows the strong FMR spectra of bulk Fe5GT crystal at different microwave frequencies at room temperature (RT), demonstrating the FM state of Fe5GT at RT. By fitting the derivative curve with a combination of symmetric and antisymmetric Lorentzian functions,34 one can extract the resonance field Hr and peak-to-peak linewidth ΔH as shown in Figs. 1(e) and 1(f). The resonance field vs microwave frequency curve [Fig. 1(e)] can be fitted with the following equation:13,
f=γ(Hr+4πMeff)Hr,
(1)
where f is the microwave frequency, γ=γ2π is the reduced gyromagnetic ratio, and 4πMeff is the effective magnetization. By fitting the data in Fig. 1(e) with Eq. (1), we obtained the Landé g-factor of 1.97 GHz/KOe using γ=gμB and the effective magnetization Meff value of 1.946 KG, which was consistent with the literature’s result.13 In Fig. 1(f), the linewidth ΔH follows the expected linear dependence on frequency f with the slope α representing the intrinsic FMR damping,13 
ΔH=2αeff3γf2π+ΔH0+ΔHTMS,
(2)
where ΔH0 is the intercept of linewidth at zero frequency, ΔHTMS is two-magnon scattering, and γ is the gyromagnetic ratio. The linear fitting (solid lines) of Fig. 1(f) yields α = 0.038 for Fe5GT with an external magnetic field along the in-plane direction. Our FMR results indicate that the bulk Fe5GT crystal holds RT magnetism and spin dynamics with the stimuli of high-frequency microwaves.

Figure 2(a) shows an image of a 90-nm-thick Fe5GT flake. Using a focused ion beam, we exposed a series of square-shaped areas (5 × 5 µm2) on this flake with Ga irradiation (30 keV, 11 pA) of different exposure times, as labeled in Fig. 2(b). Other conditions, such as the square size, sample thickness, and Ga voltage/current, were kept the same to single out the effect of Ga irradiation fluence on the modulation of magnetism in Fe5GT.33 The high energy Ga indeed sputtered away some Fe5GT materials [Fig. 2(h)] and implanted Ga into the milled regions. We also carried out energy dispersive x-ray (EDX) spectroscopy mapping of Ga-milled Fe5GT to identify the atomic ratio of Ga implanted in the Fe5GT [Figs. 2(c)2(f)]. The Ga+ ratio increased from ∼0.30% for the 15 s milled area to ∼0.85% for the 120 s milled area [Fig. 2(i)], which was consistent with the calculation of Ga+ implantation in the Fe5GT flake shown below. According to our calculation, the Ga dose was 4.125 × 1015 ions·cm−2 for the 15 s milled area. Based on our TRansport of Ions in Matter (TRIM) simulation, we found that the average Ga+ implantation length in a Fe5GT flake was about 14 nm (see Sec. II of the supplementary material). Thus, the Ga ion’s implantation density was 2.95 × 10−3 ions·Å−3 for the 15 s milled area (assuming 100% incident Ga+ were implanted into Fe5GT).

FIG. 2.

Ga+ implantation into the Fe5GT flake. (a) Microscopy image of a Fe5GT flake with the thickness ∼90 nm as indicated in (g). (b) Enlarged microscopy image of the region with various Ga exposure times. The milling area is labeled with different colors of squares (5 × 5 µm2). (h) Depth profile for areas with different exposure times in the region shown in (b). (c)–(f) Typical images of energy dispersive x-ray (EDX) spectroscopy mapping of 120 s Ga-implanted Fe5GT. (i) Atomic ratio of Ga implanted into the Fe5GT as a function of milling time.

FIG. 2.

Ga+ implantation into the Fe5GT flake. (a) Microscopy image of a Fe5GT flake with the thickness ∼90 nm as indicated in (g). (b) Enlarged microscopy image of the region with various Ga exposure times. The milling area is labeled with different colors of squares (5 × 5 µm2). (h) Depth profile for areas with different exposure times in the region shown in (b). (c)–(f) Typical images of energy dispersive x-ray (EDX) spectroscopy mapping of 120 s Ga-implanted Fe5GT. (i) Atomic ratio of Ga implanted into the Fe5GT as a function of milling time.

Close modal

To study the modulation of magnetism from Ga-implanted Fe5GT, we used spatially and element-resolved photoemission electron microscopy (PEEM), which utilizes secondary electrons to reconstruct the magnetic domain structures of the magnetic samples (see Sec. III of the supplementary material). With a circular x ray at 16° grazing incidence, PEEM is sensitive to both in-plane and out-of-plane magnetization in Fe5GT [Fig. 3(a)]. The magnetic domain images were taken by dividing the PEEM image at the Fe L3 edge (710 eV) from that at the Fe L2 edge (723 eV). The reversed magnetic domain contrast in Figs. 3(b) and 3(c) with opposite circular x-ray polarity confirmed the magnetic origin of the domain images. Moreover, we found that the milled Fe5GT exhibited a multidomain or magnetic vortex state for a low Ga+-dose area, indicating the in-plane-oriented magnetization for the Ga-implanted area. To quantitatively characterize the modulation of magnetism from the Ga-milled region, the x-ray magnetic circular dichroism (XMCD) signal was analyzed at different spots, as labeled in Fig. 3(b). Thus, we found that the un-milled Fe5GT flake showed a zero flat XMCD signal [Fig. 3(d)], indicating the PM state of the Fe5GT flake, which was consistent with the TC value concluded from the later temperature-dependent hysteresis loop results in Fig. 4(c). Figures 3(e) and 3(f) show the typical x-ray absorption spectra (XAS) and XMCD signals from the Ga-implanted area with exposure times of 45 and 120 s. The XMCD value increased from zero to ∼9.2% with increasing Ga+ milling time and saturates for milling time above 60 s [Fig. 3(g)], indicating the induced stronger magnetism in Fe5GT with longer Ga exposure times.

FIG. 3.

Photoemission electron microscopy (PEEM) imaging and spatially resolved XMCD characterization of the RT magnetism in the Ga-implanted Fe5GT flake. (a) Schematic drawing of PEEM setup. Magnetic domain images using (b) left-circular and (c) right-circular x rays. The dashed shapes labeled in (b) represent the area from which the XMCD signal was obtained. Selected x-ray magnetic circular dichroism (XMCD) signal with Ga-exposure times of (d) t = 0 s, (e) t = 45 s, and (f) t = 120 s. (g) Analyzed absolute XMCD value at Fe L3 edge as a function of milling time. (h) Various XASs at Fe L3 edge from areas with different Ga-exposure times. The inset shows the milling time-dependent Fe L3 ratio with the definition of Fe ratio = I1 (710.2 eV)/I2 (711.4 eV).

FIG. 3.

Photoemission electron microscopy (PEEM) imaging and spatially resolved XMCD characterization of the RT magnetism in the Ga-implanted Fe5GT flake. (a) Schematic drawing of PEEM setup. Magnetic domain images using (b) left-circular and (c) right-circular x rays. The dashed shapes labeled in (b) represent the area from which the XMCD signal was obtained. Selected x-ray magnetic circular dichroism (XMCD) signal with Ga-exposure times of (d) t = 0 s, (e) t = 45 s, and (f) t = 120 s. (g) Analyzed absolute XMCD value at Fe L3 edge as a function of milling time. (h) Various XASs at Fe L3 edge from areas with different Ga-exposure times. The inset shows the milling time-dependent Fe L3 ratio with the definition of Fe ratio = I1 (710.2 eV)/I2 (711.4 eV).

Close modal
FIG. 4.

Kerr microscopy characterization of the magnetic anisotropy and TC of Ga-implanted Fe5GT flake. (a) Schematic drawing of the longitudinal magneto-optical Kerr effect (MOKE) measurement. Temperature-dependent hysteresis loops of (c) the un-milled Fe5GT flake and (e) the milled region with a Ga-exposure time of 15 s. (d) Hysteresis loops from the area with different Ga-exposure times at RT. (b) The extracted coercivities as a function of milling time from (d). Loops of H//ab in (c), (d), and (e) were measured in the L-MOKE mode with a field applied along the in-plane direction of Fe5GT, whereas loops of H//c in (c) were measured in the polar-MOKE geometry with a field applied along the out-of-plane direction of Fe5GT.

FIG. 4.

Kerr microscopy characterization of the magnetic anisotropy and TC of Ga-implanted Fe5GT flake. (a) Schematic drawing of the longitudinal magneto-optical Kerr effect (MOKE) measurement. Temperature-dependent hysteresis loops of (c) the un-milled Fe5GT flake and (e) the milled region with a Ga-exposure time of 15 s. (d) Hysteresis loops from the area with different Ga-exposure times at RT. (b) The extracted coercivities as a function of milling time from (d). Loops of H//ab in (c), (d), and (e) were measured in the L-MOKE mode with a field applied along the in-plane direction of Fe5GT, whereas loops of H//c in (c) were measured in the polar-MOKE geometry with a field applied along the out-of-plane direction of Fe5GT.

Close modal

Since the PEEM does not allow the simultaneous application of magnetic field and domain imaging, we studied the modulation of magnetic anisotropy in Ga-milled Fe5GT using spatially resolved magneto-optic Kerr microscopy. Kerr microscopy enabled hysteresis loop measurement with a magnetic field applied both along the in-plane direction in the longitudinal magneto-optic Kerr effect (MOKE) geometry [Fig. 4(a)] and the out-of-plane direction in the polar MOKE geometry (see Sec. IV of the supplementary material). Figure 4(c) shows temperature-dependent hysteresis loops from the un-milled Fe5GT flakes, where the out-of-plane hysteresis loops show larger squareness and smaller saturation fields compared with in-plane hysteresis loops, indicating that the easy axis remains along the out-of-plane c axis at various temperatures below the TC of ∼290 K. This is different from the result of the easy axis along the in-plane direction in the bulk Fe5GT crystals shown in Fig. 1. In fact, controversies have existed regarding the easy axis direction of the Fe5GT flake, with different conclusions of in-plane12 and out-of-plane oriented easy axes14 and thickness-15–18 or temperature-dependent8,10,11,15 spin reorientation transitions.

Figure 4(d) shows the in-plane hysteresis loops from the series of milled squares on the Fe5GT flake. Different from the zero flat hysteresis loop at the un-milled area, we found that all of the Ga-implanted areas show square-shaped or near-square-shaped hysteresis loops, demonstrating that the Ga+ implantation enhanced the TC above RT and switched the easy axis of Fe5GT from the out-of-plane to the in-plane direction, which is consistent with the domain patterns shown in Figs. 3(b) and 3(c). The coercive field as a function of the exposure time is summarized in Fig. 4(b), which increases from 15 Oe at the 15 s milled area to ∼80 Oe at the 120 s milled area, indicating an enhanced magneto-crystalline anisotropy for Fe5GT with longer Ga exposure time. To identify the TC enhancement with Ga+ implantation, we performed temperature-dependent hysteresis loop measurement from the Ga-milled area. Despite the relatively large noise level due to the limited cumulative area (5 × 5 µm2), we were able to identify that the TC was enhanced to above 360 K for the 15 s milled area [Fig. 4(e)]. Considering that the XMCD signal was stronger in areas with longer Ga exposure times at RT, the TC should be higher for Ga-milled areas with longer exposure times. Therefore, we conclude that by implanting Ga+ with >10−3 ions·Å−3 and a fluence of >1015 ions·cm−2 in Fe5GT, TC can be enhanced from 290 to above 360 K with a switched magnetic easy axis from an out-of-plane to an in-plane direction and a stronger magneto-crystalline energy at a higher Ga+ implantation level. Moreover, since the near square-shaped hysteresis loop is indispensable for the application of 2D vdW magnetic materials in spintronic devices,6 our result provides an avenue for spintronic devices based on vdW FM.

After confirming the enhancement of TC and the modulation of magnetic anisotropy in Fe5GT by Ga irradiation, the next question is what the effect of Ga irradiation on the Fe5GT flake is and why the magnetism of Fe5GT changes. As clearly shown in the depth profile characterized by atomic force microscopy (AFM) in Fig. 2(h), the high energy Ga did sputter away some top Fe5GT in the milled region. For the 120 s milled area, about 40 nm Fe5GT was milled away. In addition to the sputtering effect, high energy Ga has also been reported to result in the change of surface morphology,35 amorphization36 or structural change, formation of defects,37 or change of the valence state in the original material.38 With increasing milling time, we found that the surface of the milled region became rougher, as indicated by fluctuations in the depth profile [Fig. 2(h)]. This point is further confirmed by the multiple isolated white (black) grain domains in the background of the big black (white) domain for 90 and 120 s milled area in Figs. 3(b) and 3(c). However, it is difficult to conduct a depth-profile structural analysis when the idea of the FIB-cutting process introduces more damage to the Fe5GT material or when the idea of microdiffraction characterization cannot rule out the small amount of amorphous or structurally changed Fe5GT.33 More likely, some parts of Ga-exposed Fe5GT changed into amorphous or structurally damaged Fe5GT. Although it is difficult to quantify the amount of amorphous layer and the percentage of the remaining crystalline Fe5GT, we estimated a possible 10–30 nm amorphous layer according to the result of the TRIM simulation (see Sec. II of the supplementary material). Figure 3(h) clearly shows the chemical analysis of Fe atoms by taking element-resolved XAS at the Fe L absorption edge. In addition, we found that the height of the second peak at the Fe L3 edge (711.4 eV) decreased with a longer milling time. Specifically, the Fe ratio had a sudden drop for milling time from 30 to 60 s [Inset of Fig. 3(h)]. This result indicates a change in the valence state of Fe atoms after Ga+ implantation, which is different from that of the Fe3GT flake after Ga+ implantation, where the Fe L3 edge shows little change with the height of the second peak becoming slightly higher.33 The drop of the second peak intensity at the Fe L3 edge (711.4 eV) combined with the single peak of Fe XMCD at the L3 and L2 edge rules out the ferromagnetic origin from any possible Fe oxides, such as γ-Fe2O3 and Fe3O4.39 The large XMCD ratio (∼9.2%) [Fig. 3(g)] from the Ga-milled area suggests that the magnetic signal is from the majority of Fe atoms in Fe5GT and, thus, rules out the magnetic origin of Fe atoms next to the Ga atoms (the latter case would lead to only ∼10% of our observed XMCD magnitude).

Although PEEM is extremely surface sensitive with a probe depth of several nm40 and MOKE has a probe length of ∼20 nm,41 the formation of a magnetic vortex and a multidomain state in Figs. 3(b) and 3(c) indicate that the magnetic layer in Fe5GT was thicker than 50 nm considering the size and shape of the milled microstructures in this work.32 Therefore, deeper Fe5GT materials than the probed depth should have changed the magnetic properties. Although it is difficult to unambiguously identify the underlying mechanism for the enhancement of TC and the modulation of magnetic anisotropy in Fe5GT by Ga irradiation, we offered several possibilities as shown below. Many studies have reported that a small number of foreign atoms introduced by intercalation could dramatically change the magnetic properties of vdW magnetic materials.42 For example, carrier doping at an electron density of 1014 cm−2 significantly increases the TC from 61 K to over 200 K and switches the magnetic easy axis from the out-of-plane to the in-plane in Cr2GeTe6.43,44 Lithium ions intercalation at the level of 1014 cm−2 enhanced the TC of 2D-regime Fe3GT from 100 K to over RT.28 Moreover, electrostatic doping at an electron density of 2.5 × 1013 cm−2 induced the AFM-FM transition in CrI3,45 and organic cations doping at the level of 0.2–0.5 electrons/cell induces an AFM-ferrimagnetic transition in NiPS3.46 Moreover, only 2.5% and 5% arsenic substitution in Fe5GT enhanced the FM order and weakened the magnetic anisotropy.31 Thus, it is highly likely that the intercalation of Ga ions (at the influence of 1015 ions·cm−2 and amount of 10−3 ions·Å−3) could be a possible mechanism for the modified magnetism in Ga-milled Fe5GT. The second possibility could be the strain effect. The sodium-intercalation in Fe3GT has been reported to have caused ∼3% in-plane tensile strain and 1% out-of-plane compressive strain.30 The tiny lithium intercalation (∼0.2 Li per nm3) in WTe2 caused up to ∼5% uniaxial in-plane strain and ∼6% out-of-plane expansion.47 Since the strain engineering has been demonstrated to be an efficient way to manipulate magnetic properties,48 the strain could possibly lead to the enhancement of TC and change of the magnetic easy axis in Ga-implanted Fe5GT. Another possibility could be that the intercalated Ga atoms form new chemical bonds with or replace the host atoms, leading to modulated magnetic properties in Fe5GT. Recent studies have reported a high above-RT TC (350–380 K) and large magnetic moment in 2D vdW Fe3GaTe2.49 Obviously, more investigations into the effect of Ga+ implantation (structure change, defect amount, amorphization level, chemical bonding, distribution of intercalation ions, etc.) on Fe5GT are needed in the future.

In summary, we demonstrate an efficient and reliable way to enhance the TC and change the magnetic anisotropy of the vdW Fe5GeTe2 material by Ga+ implantation. We show that the easy axis of the bulk Fe5GT (TC = 310 K) is in plane, while the easy axis of the Fe5GT flake (TC = 290 K) is out of plane. By implanting Ga+ with the amount of 10−3 ions·Å−3 and fluence of ∼1015 ions·cm−2, the Fe5GT Curie temperature was greatly enhanced from 290 to 360 K with a switched magnetic easy axis from the out-of-plane to the in-plane direction. The room-temperature XMCD signal of 2D Fe5GT materials was enhanced from 0% to 9% by an implantation amount of 10−2 Ga+·Å−3. Our result opens up a promising opportunity for tailoring the above-room-temperature magnetism for the future application of vdW materials in spintronic devices.

See the supplementary material for additional experimental details and introduction of FMR characterization, PEEM measurement, Kerr microscopy setup, and detailed results of TRIM simulation.

The project was primarily supported by the Fundamental Research Funds for the Central Universities (Grant No. wk2310000104), the USTC Research Funds of the Double First-Class Initiative (Grant No. YD2140002004), the National Natural Science Foundation of China (Grant Nos. 12174364, 12104003, and 12241406), Users with Excellence Program of Hefei Science Center CAS (Grant No. 2021HSC-UE003), and Open Funds of Hefei National Research Center for Physical Sciences at the Microscale (Grant No. KF2021001). This work was partially carried out at the USTC Center for Micro and Nanoscale Research and Fabrication. Z.Q.Q. acknowledges the support of the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences, Materials Sciences and Engineering Division under Contract No. DE-AC02-05CH11231 (van der Waals heterostructures program, KCWF16), Future Materials Discovery Program through the National Research Foundation of Korea (Grant No. 2015M3D1A1070467), Science Research Center Program through the National Research Foundation of Korea (Grant No. 2015R1A5A1009962), and the King Abdullah University of Science and Technology (KAUST) under Award No. ORA-CRG10-2021-4665. The PEEM measurement was performed at the XPEEM endstation at BL09U Dreamline at Shanghai Synchrotron Radiation Facility (SSRF). This research used resources of Beamlines XMCD-A and XMCD-B (Soochow Beamline for Energy Materials) at NSRL.

The authors have no conflicts to disclose.

M.Y. and Q.L. designed the experiments, analyzed data and wrote the paper. Y.N.Y., D.X.L., J.J.Y. and G.H.Z. performed the PEEM measurements. Y.N.Y., D.X.L., J.J.Y., F.F.P., S.Y.W., and J.M.G. performed the Kerr microscopy and FMR measurement. X.C. helped with the VSM characterization. R.Q.L., Z.L., and W.S.Y. helped with EDX characterization. L.W. and Z.L.L. helped with the AFM measurement. S.G.W. and Z.Q.Q. were involved in the data analysis and discussion.

Yanan Yuan: Data curation (lead); Formal analysis (lead). Daxiang Liu: Data curation (supporting). Jingjing Yu: Data curation (supporting). Guanhua Zhang: Data curation (supporting). Xiang Chen: Data curation (supporting). Ruiqi Liu: Data curation (supporting). Siyu Wang: Data curation (equal). Fangfang Pei: Data curation (supporting). Long Wei: Data curation (supporting). Zhi Li: Data curation (supporting). Junming Guo: Data curation (supporting). Shouguo Wang: Investigation (supporting). Zhaoliang Liao: Resources (supporting). Wensheng Yan: Resources (supporting). Ziqiang Qiu: Supervision (supporting). Mengmeng Yang: Conceptualization (equal); Supervision (equal); Writing – review & editing (equal). Qian Li: Conceptualization (equal); Funding acquisition (equal); Investigation (equal); Supervision (equal); Writing – original draft (equal).

The data that support the findings of this study are available within the article and its supplementary material.

1.
B.
Huang
,
G.
Clark
,
E.
Navarro-Moratalla
,
D. R.
Klein
,
R.
Cheng
,
K. L.
Seyler
,
D.
Zhong
,
E.
Schmidgall
,
M. A.
McGuire
,
D. H.
Cobden
,
W.
Yao
,
D.
Xiao
,
P.
Jarillo-Herrero
, and
X.
Xu
, “
Layer-dependent ferromagnetism in a van der Waals crystal down to the monolayer limit
,”
Nature
546
(
7657
),
270
273
(
2017
).
2.
C.
Gong
,
L.
Li
,
Z.
Li
,
H.
Ji
,
A.
Stern
,
Y.
Xia
,
T.
Cao
,
W.
Bao
,
C.
Wang
,
Y.
Wang
,
Z. Q.
Qiu
,
R. J.
Cava
,
S. G.
Louie
,
J.
Xia
, and
X.
Zhang
, “
Discovery of intrinsic ferromagnetism in two-dimensional van der Waals crystals
,”
Nature
546
(
7657
),
265
269
(
2017
).
3.
Q.
Wang
,
A.
Bedoya-Pinto
,
M.
Blei
,
A. H.
Dismukes
,
A.
Hamo
,
S. M.
Jenkins
,
M.
Koperski
,
Y.
Liu
,
Q.-C.
Sun
,
E. J.
Telford
,
H. H.
Kim
,
M.
Augustin
,
U.
Vool
,
J.
Yin
,
L.
Li
,
A.
Falin
,
C.
Dean
,
F.
Casanova
, and
R. F. L.
Evans
,
M.
Chshiev
,
A.
Mishchenko
,
C.
Petrovic
,
R.
He
,
L.
Zhao
,
A. W.
Tsen
,
B. D.
Gerardot
,
M.
Brotons-Gisbert
,
Z.
Guguchia
,
X.
Roy
,
S.
Tongay
,
Z.
Wang
,
M. Z.
Hasan
,
J.
Wrachtrup
,
A.
Yacoby
,
A.
Fert
,
S.
Parkin
,
K. S.
Novoselov
,
P.
Dai
,
L.
Balicas
, and
E. J. G.
Santos
, “
The magnetic genome of two-dimensional van der Waals materials
,”
ACS Nano
16
(
5
),
6960
7079
(
2022
).
4.
B.
Chen
,
J.
Yang
,
H.
Wang
,
M.
Imai
,
H.
Ohta
,
C.
Michioka
,
K.
Yoshimura
, and
M.
Fang
, “
Magnetic properties of layered itinerant electron ferromagnet Fe3GeTe2
,”
J. Phys. Soc. Jpn.
82
(
12
),
124711
(
2013
).
5.
N.
León-Brito
,
E. D.
Bauer
,
F.
Ronning
,
J. D.
Thompson
, and
R.
Movshovich
, “
Magnetic microstructure and magnetic properties of uniaxial itinerant ferromagnet Fe3GeTe2
,”
J. Appl. Phys.
120
,
083903
(
2016
).
6.
C.
Tan
,
J.
Lee
,
S.-G.
Jung
,
T.
Park
,
S.
Albarakati
,
J.
Partridge
,
M. R.
Field
,
D. G.
McCulloch
,
L.
Wang
, and
C.
Lee
, “
Hard magnetic properties in nanoflake van der Waals Fe3GeTe2
,”
Nat. Commun.
9
(
1
),
1554
(
2018
).
7.
Z.
Fei
,
B.
Huang
,
P.
Malinowski
,
W.
Wang
,
T.
Song
,
J.
Sanchez
,
W.
Yao
,
D.
Xiao
,
X.
Zhu
,
A. F.
May
,
W.
Wu
,
D. H.
Cobden
,
J.-H.
Chu
, and
X.
Xu
, “
Two-dimensional itinerant ferromagnetism in atomically thin Fe3GeTe2
,”
Nat. Mater.
17
(
9
),
778
782
(
2018
).
8.
A. F.
May
,
D. A.
Ovchinnikov
,
Q.
Zheng
,
R. P.
Hermann
,
S.
Calder
,
B.
Huang
,
Z.
Fei
,
Y.
Liu
,
X.
Xu
, and
M. A.
McGuire
, “
Ferromagnetism near room temperature in the cleavable van der Waals crystal Fe5GeTe2
,”
ACS Nano
13
(
4
),
4436
4442
(
2019
).
9.
J. F.
Stahl
,
E.
Shlaen
, and
D.
Johrendt
, “
The van der Waals ferromagnets Fe5−δGeTe2and Fe5−δxNixGeTe2—Crystal structure, stacking faults, and magnetic properties
,”
Z. Anorg. Allg. Chem.
644
(
24
),
1923
1929
(
2018
).
10.
A. F.
May
,
C. A.
Bridges
, and
M. A.
McGuire
, “
Physical properties and thermal stability of Fe5−xGeTe2 single crystals
,”
Phys. Rev. Mater.
3
(
10
),
104401
(
2019
).
11.
J.
Seo
,
D. Y.
Kim
,
E. S.
An
,
K.
Kim
,
G.-Y.
Kim
,
S.-Y.
Hwang
,
D. W.
Kim
,
B. G.
Jang
,
H.
Kim
,
G.
Eom
,
S. Y.
Seo
,
R.
Stania
,
M.
Muntwiler
,
J.
Lee
,
K.
Watanabe
,
T.
Taniguchi
,
Y. J.
Jo
,
J.
Lee
,
B. I.
Min
,
M. H.
Jo
,
H. W.
Yeom
,
S. Y.
Choi
,
J. H.
Shim
, and
J. S.
Kim
, “
Nearly room temperature ferromagnetism in a magnetic metal-rich van der Waals metal
,”
Sci. Adv.
6
(
3
),
eaay8912
(
2020
).
12.
H.
Zhang
,
R.
Chen
,
K.
Zhai
,
X.
Chen
,
L.
Caretta
,
X.
Huang
,
R. V.
Chopdekar
,
J.
Cao
,
J.
Sun
,
J.
Yao
,
R. J.
Birgeneau
, and
R.
Ramesh
, “
Itinerant ferromagnetism in van der Waals Fe5−xGeTe2 crystals above room temperature
,”
Phys. Rev. B
102
(
6
),
064417
(
2020
).
13.
L.
Alahmed
,
B.
Nepal
,
J.
Macy
,
W.
Zheng
,
B.
Casas
,
A.
Sapkota
,
N. B.
Jones
,
A. R.
Mazza
,
M.
Brahlek
,
W.
Jin
,
M.
Mahjouri-Samani
,
S. S. L.
Zhang
,
C.
Mewes
,
L.
Balicas
, and
T.
Mewes
, “
Magnetism and spin dynamics in room-temperature van der Waals magnet Fe5GeTe2
,”
2D Mater.
8
(
4
),
045030
(
2021
).
14.
C.
Tan
,
W.-Q.
Xie
,
G.
Zheng
,
N.
Aloufi
,
S.
Albarakati
,
M.
Algarni
,
J.
Li
,
J.
Partridge
,
D.
Culcer
,
X.
Wang
,
J. B.
Yi
,
M.
Tian
,
Y.
Xiong
,
Y.-J.
Zhao
, and
L.
Wang
, “
Gate-controlled magnetic phase transition in a van der Waals magnet Fe5GeTe2
,”
Nano Lett.
21
(
13
),
5599
5605
(
2021
).
15.
M.
Tang
,
J.-W.
Huang
,
F.
Qin
,
K.
Zhai
,
T.
Ideue
,
Z.
Li
,
F.
Meng
,
A.
Nie
,
L.
Wu
,
X.
Bi
,
C.
Zhang
,
L.
Zhou
,
P.
Chen
,
C.
Qiu
,
P.
Tang
,
H.
Zhang
,
X.
Wan
,
L.
Wang
,
Z.
Liu
,
Y.
Tian
,
Y.
Iwasa
, and
H.
Yuan
, “
Continuous manipulation of magnetic anisotropy in a van der Waals ferromagnet via electrical gating
,”
Nat. Electron.
6
,
28
(
2022
).
16.
T.
Ohta
,
K.
Sakai
,
H.
Taniguchi
,
B.
Driesen
,
Y.
Okada
,
K.
Kobayashi
, and
Y.
Niimi
, “
Enhancement of coercive field in atomically-thin quenched Fe5GeTe2 you may also like revealing room temperature ferromagnetism in exfoliated Fe5GeTe2 flakes with quantum magnetic imaging emerging intrinsic magnetism in two-dimensional materials: Theory and applications
,”
Appl. Phys. Express
13
,
043005
(
2020
).
17.
R.
Fujita
,
P.
Bassirian
,
Z.
Li
,
Y.
Guo
,
M. A.
Mawass
,
F.
Kronast
,
G.
van der Laan
, and
T.
Hesjedal
, “
Layer-dependent magnetic domains in atomically thin Fe5GeTe2
,”
ACS Nano
16
(
7
),
10545
10553
(
2022
).
18.
Y.
Deng
,
Z.
Xiang
,
B.
Lei
,
K.
Zhu
,
H.
Mu
,
W. Z.
Zhuo
,
X.
Hua
,
M.
Wang
,
Z.
Wang
,
G.
Wang
,
M.
Tian
, and
X. R.
Chen
, “
Layer-number-dependent magnetism and anomalous Hall effect in van der Waals ferromagnet Fe5GeTe2
,”
Nano Lett.
22
(
24
),
9839
9846
(
2022
).
19.
X.
Bi
,
C.
Qiu
,
F.
Qin
,
J.
Huang
, and
H.
Yuan
, “
Controlling exchange interactions and emergent magnetic phenomena in layered 3d‐orbital ferromagnets
,”
Adv. Phys. Res.
2
,
2200106
(
2023
).
20.
Z.
Li
,
M.
Tang
,
J.-W.
Huang
,
F.
Qin
,
L.
Ao
,
Z.
Shen
,
C.
Zhang
,
P.
Chen
,
X.
Bi
,
C.
Qiu
,
Z.
Yu
,
K.
Zhai
,
T.
Ideue
,
L.
Wang
,
Z.
Liu
,
Y.
Tian
,
Y.
Iwasa
, and
H.
Yuan
, “
Magnetic anisotropy control with Curie temperature above 400 K in a van der Waals ferromagnet for spintronic device
,”
Adv. Mater.
34
(
27
),
2201209
(
2022
).
21.
Y.
Wang
,
C.
Wang
,
S.-J.
Liang
,
Z.
Ma
,
K.
Xu
,
X.
Liu
,
L.
Zhang
,
A. S.
Admasu
,
S.-W.
Cheong
,
L.
Wang
,
M.
Chen
,
Z.-L.
Liu
,
B.
Cheng
,
W.
Ji
, and
F.
Miao
, “
Strain‐sensitive magnetization reversal of a van der Waals magnet
,”
Adv. Mater.
32
(
42
),
2004533
(
2020
).
22.
Y.
Cao
,
X.
Zhang
,
X.
Zhang
,
F.
Yan
,
Z.
Wang
,
W.-K.
Zhu
,
H.
Tan
,
V. N.
Golovach
,
H.
Zheng
, and
K.
Wang
, “
Room-temperature van der Waals perpendicular ferromagnet through interlayer magnetic coupling
,”
Phys. Rev. Appl.
17
(
5
),
L051001
(
2022
).
23.
H.-Y.
Wang
,
Y.
Liu
,
P.-C.
Wu
,
W.
Hou
,
Y.
Jiang
,
X.
Li
,
C.
Pandey
,
D.
Chen
,
Q.
Yang
,
H.
Wang
,
D.
Wei
,
N.
Lei
,
W.
Kang
,
L.
Wen
,
T.
Nie
, and
W.
Zhao
, and
K. L.
Wang
, “
Above room-temperature ferromagnetism in wafer-scale two-dimensional van der Waals Fe3GeTe2 tailored by a topological insulator
,”
ACS Nano
14
(
8
),
10045
10053
(
2020
).
24.
A.
May
,
M.-H.
Du
,
V.
Cooper
, and
M.
Mcguire
, “
Tuning magnetic order in the van der Waals metal Fe5GeTe2 by cobalt substitution
,”
Phys. Rev. Mater.
4
,
074008
(
2020
).
25.
C.-K.
Tian
,
F.
Pan
,
S.
Xu
,
K.
Ai
,
T.-L.
Xia
, and
P.
Cheng
, “
Tunable magnetic properties in van der Waals crystals (Fe1−xCox)5GeTe2
,”
Appl. Phys. Lett.
116
(
20
),
202402
(
2020
).
26.
H.
Zhang
,
D.
Raftrey
,
Y.-T.
Chan
,
Y.-T.
Shao
,
R.
Chen
,
X.
Chen
,
X.
Huang
,
J.
Reichanadter
,
K.
Dong
,
S.
Susarla
,
L.
Caretta
,
Z.
Chen
,
J.
Yao
,
P.
Fischer
,
J. B.
Neaton
,
W.
Wu
,
D. A.
Muller
,
R. J.
Birgeneau
, and
R.
Ramesh
, “
Room-temperature skyrmion lattice in a layered magnet (Fe0.5Co0.5)5GeTe2
,”
Sci. Adv.
8
(
12
),
eabm7103
(
2022
).
27.
X.
Chen
,
Y.-T.
Shao
,
R.
Chen
,
S.
Susarla
,
T.
Hogan
,
Y.
He
,
H.
Zhang
,
S.
Wang
,
J.
Yao
,
P.
Ercius
,
D. A.
Muller
,
R.
Ramesh
, and
R. J.
Birgeneau
, “
Pervasive beyond room-temperature ferromagnetism in a doped van der Waals magnet
,”
Phys. Rev. Lett.
128
(
21
),
217203
(
2022
).
28.
Y.
Deng
,
Y.
Yu
,
Y.
Song
,
J.
Zhang
,
N. Z.
Wang
,
Z.
Sun
,
Y.
Yi
,
Y. Z.
Wu
,
S.
Wu
,
J.
Zhu
,
J.
Wang
,
X. H.
Chen
, and
Y.
Zhang
, “
Gate-tunable room-temperature ferromagnetism in two-dimensional Fe3GeTe2
,”
Nature
563
(
7729
),
94
99
(
2018
).
29.
G.
Zheng
,
W.-Q.
Xie
,
S.
Albarakati
,
M.
Algarni
,
C.
Tan
,
Y.
Wang
,
J.
Peng
,
J.
Partridge
,
L.
Farrar
,
J.
Yi
,
Y.
Xiong
,
M.
Tian
,
Y.-J.
Zhao
, and
L.
Wang
, “
Gate-tuned interlayer coupling in van der Waals ferromagnet Fe3GeTe2 nanoflakes
,”
Phys. Rev. Lett.
125
(
4
),
047202
(
2020
).
30.
D.
Weber
,
A. H.
Trout
,
D. W.
McComb
, and
J. E.
Goldberger
, “
Decomposition-induced room-temperature magnetism of the Na-intercalated layered ferromagnet Fe3–xiGeTe2
,”
Nano Lett.
19
(
8
),
5031
5035
(
2019
).
31.
A. F.
May
,
J.
Yan
,
R.
Hermann
,
M.-H.
Du
, and
M. A.
McGuire
, “
Tuning the room temperature ferromagnetism in Fe5GeTe2 by arsenic substitution
,”
2D Mater.
9
(
1
),
015013
(
2021
).
32.
Q.
Li
,
M.
Yang
,
C.
Gong
,
R. V.
Chopdekar
,
A. T.
N’Diaye
,
J.
Turner
,
G.
Chen
,
A.
Scholl
,
P.
Shafer
,
E.
Arenholz
,
A. K.
Schmid
,
S.
Wang
,
K.
Liu
,
N.
Gao
,
A. S.
Admasu
,
S.-W.
Cheong
,
C.
Hwang
,
J.
Li
,
F.
Wang
,
X.
Zhang
, and
Z.
Qiu
, “
Patterning-induced ferromagnetism of Fe3GeTe2 van der Waals materials beyond room temperature
,”
Nano Lett.
18
(
9
),
5974
5980
(
2018
).
33.
M.
Yang
,
Q.
Li
,
R. V.
Chopdekar
,
C. V.
Stan
,
S.
Cabrini
,
J. W.
Choi
,
S.
Wang
,
T.
Wang
,
N.
Gao
,
A.
Scholl
,
N.
Tamura
,
C.
Hwang
,
F.
Wang
, and
Z.
Qiu
, “
Highly enhanced Curie temperature in Ga‐implanted Fe3GeTe2 van der Waals material
,”
Adv. Quantum Technol.
3
(
4
),
2000017
(
2020
).
34.
E.
Montoya
,
T.
McKinnon
,
A.
Zamani
,
E.
Girt
, and
B.
Heinrich
, “
Broadband ferromagnetic resonance system and methods for ultrathin magnetic films
,”
J. Magn. Magn. Mater.
356
,
12
20
(
2014
).
35.
H.
Xu
,
S.
Wang
,
J.
Ouyang
,
X.
He
,
H.
Chen
,
Y.
Li
,
Y.
Liu
,
R.
Chen
, and
J.
Yang
, “
Surface modification of multilayer FePS3 by Ga ion irradiation
,”
Sci. Rep.
9
(
1
),
15219
(
2019
).
36.
J.
Kotakoski
,
C.
Brand
,
Y.
Lilach
,
O.
Cheshnovsky
,
C.
Mangler
,
M.
Arndt
, and
J. C.
Meyer
, “
Toward two-dimensional all-carbon heterostructures via ion beam patterning of single-layer graphene
,”
Nano Lett.
15
(
9
),
5944
5949
(
2015
).
37.
Y.
Hu
,
S.
Zhang
,
Y.
Zhu
,
C.
Song
,
J.
Huang
,
C.
Liu
,
X.
Meng
,
X.
Deng
,
L.
Zhu
,
G.
Chaoshuai
,
H.
Yang
,
M.
Si
,
J.
Zhang
, and
Y.
Peng
, “
Precise tuning of skyrmion density in a controllable manner by ion irradiation
,”
ACS Appl. Mater. Interfaces
14
(
29
),
34011
34019
(
2022
).
38.
P.
Malinský
,
A.
Macková
,
M.
Florianová
,
M.
Cutroneo
,
V.
Hnatowicz
,
M.
Bohacova
,
K.
Szőkölová
,
R.
Böttger
, and
Z.
Sofer
, “
The structural and compositional changes of graphene oxide induced by irradiation with 500 keV helium and gallium ions
,”
Phys. Status Solidi B
256
(
5
),
1800409
(
2019
).
39.
D.-H.
Kim
,
H.
Lee
,
G. N.
Kim
,
Y. S.
Koo
,
J. H.
Jung
,
H. J.
Shin
,
J. Y.
Kim
, and
J. S.
Kang
, “
Interface electronic structures of BaTiO3 @ X nanoparticles (X = γ-Fe2O3, Fe3O4, α-Fe2O3, and Fe) investigated by XAS and XMCD
,”
Phys. Rev. B
79
(
3
),
033402
(
2009
).
40.
A.
Scholl
, “
Applications of photoemission electron microscopy (PEEM) in magnetism research
,”
Curr. Opin. Solid State Mater. Sci.
7
(
1
),
59
66
(
2003
).
41.
Z.
Qiu
and
S. D.
Bader
, “
Surface magneto-optic Kerr effect
,”
Rev. Sci. Instrum.
71
(
3
),
1243
1255
(
2000
).
42.
Y.
Wu
,
D.
Li
,
C.-L.
Wu
,
H. Y.
Hwang
, and
Y.
Cui
, “
Electrostatic gating and intercalation in 2D materials
,”
Nat. Rev. Mater.
8
(
1
),
41
53
(
2022
).
43.
I.
Verzhbitskiy
,
H.
Kurebayashi
,
H.-X.
Cheng
,
J.
Zhou
,
S.
Khan
,
Y. P.
Feng
, and
G.
Eda
, “
Controlling the magnetic anisotropy in Cr2Ge2Te6 by electrostatic gating
,”
Nat. Electron.
3
(
8
),
460
465
(
2020
).
44.
N.
Wang
,
H.
Tang
,
M. Z.
Shi
,
H.
Zhang
,
W. Z.
Zhuo
,
D.-Y.
Liu
,
F.
Meng
,
L. K.
Ma
,
J. J.
Ying
,
L.-J.
Zou
,
Z.
Sun
, and
X. R.
Chen
, “
Transition from ferromagnetic semiconductor to ferromagnetic metal with enhanced Curie temperature in Cr2Ge2Te6 via organic ion intercalation
,”
J. Am. Chem. Soc.
141
(
43
),
17166
17173
(
2019
).
45.
S.
Jiang
,
L.
Li
,
Z.
Wang
,
K. F.
Mak
, and
J.
Shan
, “
Controlling magnetism in 2D CrI3 by electrostatic doping
,”
Nat. Nanotechnol.
13
(
7
),
549
553
(
2018
).
46.
M.
Mi
,
X.
Zheng
,
S.
Wang
,
Y.
Zhou
,
L.
Yu
,
H.
Xiao
,
H.
Song
,
B.
Shen
,
F.
Li
,
L.
Bai
,
Y.
Chen
,
S.
Wang
,
X.
Liu
, and
Y.
Wang
, “
Variation between antiferromagnetism and ferrimagnetism in NiPS3 by electron doping
,”
Adv. Funct. Mater.
32
(
29
),
2112750
(
2022
).
47.
P. K.
Muscher
,
D. A.
Rehn
,
A.
Sood
,
K.
Lim
,
D.
Luo
,
X.
Shen
,
M.
Zajac
,
F.
Lu
,
A.
Mehta
,
Y.
Li
,
X.
Wang
,
E. J.
Reed
,
W. C.
Chueh
, and
A. M.
Lindenberg
, “
Highly efficient uniaxial in‐plane stretching of a 2D material via ion insertion
,”
Adv. Mater.
33
(
37
),
2101875
(
2021
).
48.
Y.
Qi
,
M. A.
Sadi
,
D.
Hu
,
M.
Zheng
,
Z.
Wu
,
Y.
Jiang
, and
Y. P.
Chen
, “
Recent progress in strain engineering on van der Waals 2D materials: Tunable electrical, electrochemical, magnetic and optical properties
,”
Adv. Mater.
35
,
2205714
(
2022
).
49.
G.
Zhang
,
F.
Guo
,
H.
Wu
,
X.
Wen
,
L.
Yang
,
W.
Jin
,
W.-F.
Zhang
, and
H. W.
Chang
, “
Above-room-temperature strong intrinsic ferromagnetism in 2D van der Waals Fe3GaTe2 with large perpendicular magnetic anisotropy
,”
Nat. Commun.
13
(
1
),
5067
(
2022
).

Supplementary Material