In a recent letter, Padilla et al.1 pointed out the importance of the diagonal tunneling current in the Ge electron-hole bilayer tunnel field-effect-transistor (EHBTFET), which was previously proposed with favorable ON-current and subthreshold swing (SS) based on simulations.1 This parasitic diagonal tunneling current is exacerbated by the built-in horizontal field along the channel due to different field-induced quantum confinement (FIQC) between the gate overlap and underlap regions, resulting in SS degradation of a EHBTFET. To address the issue, they proposed a heterogate design which employs substantially different metal gate work functions for the gate overlap and underlap regions to reduce the horizontal field and thus the diagonal tunneling (Fig. 1(a)).1 The work function difference, 0.5 eV or larger, was optimized for an OFF-state drain voltage, specifically VD = 0.5 V.1 However, the use of such a large work function difference could have potentially deleterious effects on the ON-state performance with low-VD CMOS logic.

FIG. 1.

(a) Schematic cross section of the simulated heterogate Ge EHBTFET (Lg,OL = Lg,UL = Ls = 50 nm, equivalent oxide thickness = 0.6 nm), and (b) eigen energy difference, ΔE, as a function of VD with the work functions of top gate 2, ϕTG2 = 4.1, 4.2, and 4.3 eV.

FIG. 1.

(a) Schematic cross section of the simulated heterogate Ge EHBTFET (Lg,OL = Lg,UL = Ls = 50 nm, equivalent oxide thickness = 0.6 nm), and (b) eigen energy difference, ΔE, as a function of VD with the work functions of top gate 2, ϕTG2 = 4.1, 4.2, and 4.3 eV.

Close modal

To examine the performance of the heterogate Ge EHBTFET under different drain bias, a full quantum mechanical (QM) simulation2 is carried out to evaluate the potential difference/barrier between the gate overlap and underlap regions. The QM (2D subbands) study is performed by solving the Schrödinger and Poisson equations self-consistently in all the 1D slices (y direction) along the channel (x direction) without the incorporation of band-to-band tunneling (BTBT). Here, we define the gate voltage, VG, at the eigenstate alignment of the first electron and hole subbands in the gate overlap region as VG,align. It is assumed that the change of the carrier density in the channel due to BTBT is too low to introduce band modification at VG = VG,align, particularly given the abrupt turn-on predicted by Padilla et al.1 The performance evaluation is conducted by investigating the eigenenergy difference, ΔE, because we only focus on the magnitude of the barrier between the gate overlap and underlap regions induced by work function differences. The magnitude of the barrier at VG = VG,align is determined using |ΔE| = |E1e,ULE1e,OL| = |E1e,ULE1h,OL|, where the E1e,UL and E1e,OL are the electron eigenenergies of the first subbands in the gate underlap and overlap regions, respectively, and E1h,OL is the hole eigenenergy of the first subband in the gate overlap region. Note that the magnitude of the subband overlap, |E1e,ULE1h,OL|, is related to the diagonal tunneling current. For simplicity, the eigenenergies are all extracted at the midpoints of their respective regions. The midpoints also serve as good reference points for estimating built-in electric fields from the simulated band diagrams (not shown).

The basic heterogate Ge EHBTFET device structure from Ref. 1 is shown in Fig. 1(a), although parameters vary in this work. High-κ gate oxides (0.6 nm equivalent oxide thickness) are used. The gate overlap length (Lg,OL), gate underlap length (Lg,UL), and the distance between the gate and source (Ls) are all set to 50 nm. A Ge (100) channel thickness of Tch = 10 nm is considered. The device consists of an intrinsic Ge region (modeled as ND = 1 × 1015 cm−3) with heavily doped source and drain (NA = ND = 1 × 1019 cm−3). With the work function of the portion of the top heterogate that covers the gate overlap region (top gate 1) set to 3.6 eV, and the work function of the bottom gate set to 5.6 eV, three different values are considered for the work function of the portion of the heterogate above the gate underlap region (top gate 2) in our simulations, ϕTG2 = 4.1, 4.2, and 4.3 eV.

Figure 1(b) illustrates the ΔE−VD relation with different ϕTG2 at VG = VG,align. For ϕTG2 = 4.1 eV, the ΔE varies quickly with increasing VD in the low-VD regime and nearly saturates in the high-VD regime. In addition, the ΔE shows a smaller shift with increasing ϕTG2 in the low-VD regime as compared to the high-VD regime. Both these behaviors can be explained by drain-induced barrier modification (DIBM),3 where the channel potential is more strongly controlled by the drain than by the gate at lower drain bias. In the high-VD regime, where the gate dominates the drain with respect to the channel potential, the change in ΔE with different ϕTG2 become very close to the change in ϕTG2. Ultimately, there exists an ideal value for ϕTG2 that results in a low and near-constant |ΔE| as a function of VD. The optimum ϕTG2 is found to be close to 4.2 eV in simulations (Fig. 1(b)). These results suggest that the heterogate EHBTFET, which can eliminate parasitic tunneling utilizing work function difference between the two top gates without degrading the ON-state performance in the low-VD regime, also is a promising TFET design. Note that although the evaluation results in this comment are performed with EHBTFETs, the heterogate design concept should be considered to be general for all the TFETs based on 2D-2D or 3D-2D tunneling.

This work was supported in part by the NRI SWAN program and NSF NASCENT ERC.

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