Plasma plume species from a ceramic La0.4Ca0.6MnO3 target were studied by plasma mass spectrometry as a function of laser fluence, background gas, and deposition pressure to understand the interplay between plasma composition and oxide thin film growth by pulsed laser deposition. The plume composition reveals a significant contribution of up to 24% of negative ions, most notably using a N2O background. The significance of negative ions for thin film growth is shown for La0.4Ca0.6MnO3 films grown in different background conditions where the best structural properties coincide with the largest amount of negative plasma species.
Negative ions: The overlooked species in thin film growth by pulsed laser deposition
M. Esposito, M. Bator, M. Döbeli, T. Lippert, C. W. Schneider, A. Wokaun; Negative ions: The overlooked species in thin film growth by pulsed laser deposition. Appl. Phys. Lett. 7 November 2011; 99 (19): 191501. https://doi.org/10.1063/1.3660399
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