A super-exponential time-relaxation of the full width at half maximum of Ti and Ti+ spectral lines was found during the off-time in a high-power impulse magnetron sputtering discharge studied by laser-induced fluorescence. After the estimation of the possible broadening mechanisms, the main contribution to the determined linewidths appeared to be the broadening due to ballistic motion of sputtered species with a minor contribution of the instrumental and Doppler broadenings. The deconvoluted linewidths depend both on pressure and distance from target, and their time-decay was attributed to the fast energy relaxation of the sputtered neutrals and ions during the off-time.

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