We characterize the optical and carrier-collection physics of multi-scale textured p-type black Si solar cells with conversion efficiency of 17.1%. The multi-scale texture is achieved by combining density-graded nanoporous layer made by metal-assisted etching with micron-scale pyramid texture. We found that (1) reducing the thickness of nanostructured Si layer improves the short-wavelength spectral response and (2) multi-scale texture permits thinning of the nanostructured layer while maintaining low surface reflection. We have reduced the nanostructured layer thickness by 60% while retaining a solar-spectrum-averaged black Si reflectance of less than 2%. Spectral response at 450 nm has improved from 57% to 71%.

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