We report on high responsivity, broadband metal/insulator/semiconductor photodetectors with amorphous Ge quantum dots (a-Ge QDs) as the active absorbers embedded in a silicon dioxide matrix. Spectral responsivities between 1–4 A/W are achieved in the 500–900 nm wavelength range with internal quantum efficiencies (IQEs) as high as 700%. We investigate the role of a-Ge QDs in the photocurrent generation and explain the high IQE as a result of transport mechanisms via photoexcited QDs. These results suggest that a-Ge QDs are promising for high-performance integrated optoelectronic devices that are fully compatible with silicon technology in terms of fabrication and thermal budget.

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See supplementary material at http://dx.doi.org/10.1063/1.3597360 for additional information on data analysis.

Supplementary Material

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