Synchrotron radiation photoelectron spectroscopy (SRPES) is used to investigate the in situ formation of ultra thin Mn silicate layers on , which has relevance for copper diffusion barrier layers in microelectronic devices. High temperature vacuum annealing of metallic Mn deposited on a 4 nm thermally grown film results in the self limiting formation of a magnesium silicate layer, the stoichiometry of which is consistent with the formation of . Curve fitted SRPES spectra show no evidence for the presence of a manganese oxide phase at the interface, in contrast to previous reports.
REFERENCES
1.
R.
Gordon
and H.
Kim
, International Patent No. WO 2009/117670 A2 (24 September, 2009
).2.
Y.
Lee
and Y. -L.
Kuo
, JOM
59
, 44
(2007
).3.
Y.
Au
, Y.
Lin
, H.
Kim
, E.
Beh
, Y.
Liu
, and R. G.
Gordon
, J. Electrochem. Soc.
157
, D341
(2010
).4.
J.
Koike
and M.
Wada
, Appl. Phys. Lett.
87
, 041911
(2005
).5.
J.
Iijima
, Y.
Fujii
, and J.
Koike
, J. Vac. Sci. Technol. B
27
, 1963
(2009
).6.
S. -M.
Chung
and J.
Koike
, J. Vac. Sci. Technol. B
27
, L28
(2009
).7.
Y.
Otsuka
, J.
Koike
, H.
Sako
, K.
Ishibashi
, N.
Kawasaki
, S. M.
Chung
, and I.
Tanaka
, Appl. Phys. Lett.
96
, 012101
(2010
).8.
J.
Koike
, M.
Haneda
, J.
Iijima
, Y.
Otsuka
, H.
Sako
, and K.
Neishi
, J. Appl. Phys.
102
, 043527
(2007
).9.
U.
Manju
, D.
Topwal
, G.
Rossi
, and I.
Vobornik
, Phys. Rev. B
82
, 035442
(2010
).10.
C.
Yoon
and D. L.
Cocke
, Appl. Surf. Sci.
31
, 118
(1988
).11.
S.
Rubini
, M.
Piccin
, G.
Bais
, F.
Jabeen
, F.
Martelli
, and A.
Franciosi
, J. Phys.: Conf. Ser.
61
, 992
(2007
).12.
P.
Morgen
, A.
Bahari
, U.
Robenhagen
, J. F.
Anderson
, J. K.
Hansen
, K.
Pedersen
, M. G.
Rao
, and Z. S.
Li
, J. Vac. Sci. Technol. A
23
, 201
(2005
).13.
P.
Casey
and G.
Hughes
, J. Appl. Phys.
107
, 074107
(2010
).14.
J. J.
Chambers
and G. N.
Parsons
, J. Appl. Phys.
90
, 918
(2001
).15.
J. J.
Yeh
and I.
Lindau
, At. Data Nucl. Data Tables
32
, 1
(1985
).16.
J. M.
Ablett
, J. C.
Woicik
, Z.
Tokei
, S.
List
, and E.
Dimasi
, Appl. Phys. Lett.
94
, 042112
(2009
).17.
M. J.
Frederick
, R.
Goswami
, and G.
Ramanath
, J. Appl. Phys.
93
, 5966
(2003
).18.
A. A.
Audi
and P. M. A.
Sherwood
, Surf. Interface Anal.
33
, 274
(2002
).19.
M.
Copel
, E.
Cartier
, and F. M.
Ross
, Appl. Phys. Lett.
78
, 1607
(2001
).20.
R.
Beyers
, J. Appl. Phys.
56
, 147
(1984
).21.
O. M.
Ndwandwe
, Q. Y.
Hlatshwayo
, and R.
Pretorius
, Mater. Chem. Phys.
92
, 487
(2005
).22.
M. P.
Seah
and S. J.
Spencer
, Surf. Interface Anal.
33
, 640
(2002
).© 2011 American Institute of Physics.
2011
American Institute of Physics
You do not currently have access to this content.
