Sr2RuO4 is a superconductor with a low transition temperature (Tc1K), but has a unique character of p-wave symmetry of the order parameter, demanding epitaxial thin films for Josephson junction studies. We have grown c-axis oriented epitaxial films by a pulsed laser deposition technique on (001) surfaces of (LaAlO3)0.3(SrAl0.5Ta0.5O3)0.7 substrates. Careful tuning of growth conditions yielded in a layer-by-layer growth of high crystallinity films. The films show a residual resistivity ratio (ρ300K/ρ2K) as large as 82 and a superconducting transition with a zero resistivity at 0.6 K.

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