We experimentally demonstrate a high-Q ultrathin silicon nitride microring resonator operating at wavelength of 970 nm that is favorable for large variety of biophotonic applications. Implementation of thin device layer of 200 nm allows enhanced interaction between the optical mode and environment, while still maintaining high quality factor of resonator. In addition, we show the importance of spectral window around 970 nm to improve device sensing capability.

1.
T.
Liang
,
L.
Nunes
,
T.
Sakamoto
,
K.
Sasagawa
,
T.
Kawanishi
,
M.
Tsuchiya
,
G.
Priem
,
D.
Van Thourhout
,
P.
Dumon
,
R.
Baets
, and
H.
Tsang
,
Opt. Express
13
,
7298
(
2005
).
2.
K. C.
Neuman
and
S. M.
Block
,
Rev. Sci. Instrum.
75
,
2787
(
2004
).
3.
K.
Ikeda
,
R. E.
Saperstein
,
N.
Alic
, and
Y.
Fainman
,
Opt. Express
16
,
12987
(
2008
).
4.
E. S.
Hosseini
,
S.
Yegnanarayanan
,
A. H.
Atabaki
,
M.
Soltani
, and
Ali
Adibi
,
Opt. Express
18
,
2127
(
2010
).
5.
A.
Gondarenko
,
J. S.
Levy
and
Michal
Lipson
,
Opt. Express
17
,
11366
(
2009
).
6.
S.
Blair
and
Y.
Chen
,
Appl. Opt.
40
,
570
(
2001
).
7.
S.
Mandal
,
X.
Serey
, and
D.
Erickson
,
Nano Lett.
10
,
99
(
2010
).
8.
H. J.
Yang
and
D.
Erickson
,
Lab Chip
10
,
769
(
2010
).
9.
A.
Nitkowski
,
L.
Chen
, and
M.
Lipson
,
Opt. Express
16
,
11930
(
2008
).
10.
K.
De Vos
,
I.
Bartolozzi
,
E.
Schacht
,
P.
Bienstman
, and
R.
Baets
,
Opt. Express
15
,
7610
(
2007
).
11.
C. -Y.
Chao
,
W.
Fung
, and
L. J.
Guo
,
IEEE J. Sel. Top. Quantum Electron.
12
,
134
(
2006
).
12.
A.
Yalcin
,
K. C.
Popat
,
J. C.
Aldridge
,
T. A.
Desai
,
J.
Hryniewicz
,
N.
Chbouki
,
B. E.
Little
,
O.
King
,
V.
Van
,
S.
Chu
,
D.
Gill
,
M.
Anthes-Washburn
,
M. S.
Unlu
, and
B. B.
Goldberg
,
IEEE J. Sel. Top. Quantum Electron.
12
,
148
(
2006
).
13.
S.
Xiao
,
M. H.
Khan
,
H.
Shen
, and
M.
Qi
,
Opt. Express
15
,
10553
(
2007
).
14.
Handbook of Chemistry and Physics
, 5th ed., edited by
D. R.
Lyde
(
CRC
,
London
,
1975
–1976), pp.
1997
1998
.
15.
F.
Dell'Olio
and
V. M.
Passaro
,
Opt. Express
15
,
4977
(
2007
).
16.
J. T.
Robinson
,
L.
Chen
, and
M.
Lipson
,
Opt. Express
16
,
4296
(
2008
).
17.
J. T.
Robinson
,
K.
Preston
,
O.
Painter
, and
M.
Lipson
,
Opt. Express
16
,
16659
(
2008
).
18.
K. B.
Gylfason
,
C. F.
Carlborg
,
A.
Kazmierczak
,
F.
Dortu
,
H.
Sohlström
,
L.
Vivien
,
C. A.
Barrios
,
W.
van der Wijngaart
, and
G.
Stemme
,
Opt. Express
18
,
3226
(
2010
).
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