We demonstrate the use of focused ultrasound waves to excite eigenmodes of microfabricated structures such as atomic force microscopy microcantilevers and coupled microcantilever arrays, among the smallest objects that have been excited in air using ultrasound radiation force. The method is based on the radiation force produced by a double-sideband suppressed carrier ultrasound waveform, centered at 500 kHz. The difference frequency between the sidebands, ranging from 10 to 200 kHz, excited resonances of these structures. Frequency response curves and deflection shapes were consistent with conventional base excitation, demonstrating the feasibility of noncontact excitation for a variety of microscale devices.
REFERENCES
1.
P. S.
Waggoner
and H. G.
Craighead
, Lab Chip
7
, 1238
(2007
).2.
B.
Rogers
, L.
Manning
, M.
Jones
, T.
Sulchek
, K.
Murray
, B.
Beneschott
, J. D.
Adams
, Z.
Hu
, T.
Thundat
, H.
Cavazos
, and S. C.
Minne
, Rev. Sci. Instrum.
74
, 4899
(2003
).3.
L. A.
Pinnaduwage
, T.
Thundat
, J. E.
Hawk
, D. L.
Hedden
, R.
Britt
, E. J.
Houser
, S.
Stepnowski
, R. A.
McGill
, and D.
Bubb
, Sens. Actuators B
99
, 223
(2004
).4.
L. A.
Pinnaduwage
, D. L.
Hedden
, A.
Gehl
, V. I.
Boiadjiev
, J. E.
Hawk
, R. H.
Farahi
, T.
Thundat
, E. J.
Houser
, S.
Stepnowski
, R. A.
McGill
, L.
Deel
, and R. T.
Lareau
, Rev. Sci. Instrum.
75
, 4554
(2004
).5.
B.
Ilic
, D.
Czaplewski
, M.
Zalalutdinov
, H. G.
Craighead
, P.
Neuzil
, C.
Campagnolo
, and C.
Batt
, J. Vac. Sci. Technol. B
19
, 2825
(2001
).6.
R. L.
Gunter
, W. G.
Delinger
, K.
Manygoats
, A.
Kooser
, and T. L.
Porter
, Sens. Actuators, A
107
, 219
(2003
).7.
M.
Spletzer
, A.
Raman
, A. Q.
Wu
, X. F.
Xu
, and R.
Reifenberger
, Appl. Phys. Lett.
88
, 254102
(2006
).8.
M.
Spletzer
, A.
Raman
, and R.
Reifenberger
, Appl. Phys. Lett.
91
, 184103
(2007
).9.
M.
Spletzer
, A.
Raman
, H.
Sumali
, and J. P.
Sullivan
, Appl. Phys. Lett.
92
, 114102
(2008
).10.
M.
Fatemi
and J. F.
Greenleaf
, Science
280
, 82
(1998
).11.
T. M.
Huber
, D.
Calhoun
, M.
Fatemi
, R. R.
Kinnick
, and J. F.
Greenleaf
, J. Acoust. Soc. Am.
118
, 1928
(2005
).12.
T. M.
Huber
, M.
Fatemi
, R.
Kinnick
, and J.
Greenleaf
, J. Acoust. Soc. Am.
119
, 2476
(2006
).13.
F. L.
Degertekin
, B.
Hadimioglu
, T.
Sulchek
, and C. F.
Quate
, Appl. Phys. Lett.
78
, 1628
(2001
).14.
A. G.
Onaran
and F. L.
Degertekin
, Rev. Sci. Instrum.
76
, 103703
(2005
).15.
P. J.
Westervelt
, J. Acoust. Soc. Am.
23
, 312
(1951
).16.
H.
Olsen
, W.
Romberg
, and H.
Wergeland
, J. Acoust. Soc. Am.
30
, 69
(1958
).17.
T.
Hasegawa
, T.
Kido
, T.
Iizuka
, and C.
Matsuoka
, J. Acoust. Soc. Jpn.
21
, 145
(2000
).18.
Mikromasch CSC12-E tipless AFM cantilever, http://www.spmtips.com/probes/tipless.
19.
L. E.
Kinsler
, A. R.
Frey
, A. B.
Coppens
, and J. V.
Sanders
, Fundamentals of Acoustics
, 4th ed. (John Wiley & Sons Inc.
, New York, NY
, 1999
).20.
T. M.
Huber
, E. T.
Ofstad
, S. M.
Barthell
, A.
Raman
, and M.
Spletzer
, Proceedings of the ASME International Design Engineering Technical Conference and Computers and Information in Engineering Conference
, December 2008
, Vol. 4
, p. 737
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American Institute of Physics
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