In this letter, we have studied the density of microtwins in the vicinity of the film surface, by using in-plane grazing incidence diffraction technique, to suggest a reduction trend of such defects at different growth rates. In (100) 3C–SiC heteroepitaxy, microtwin density decreases when a slower growth rate process is performed. A reduction ratio of microtwins of 0.16, 0.2, and 0.28 for , , and , respectively, has been obtained. The relationship between microtwin density and growth rate, or ratio, found with this technique is in perfect agreement with the pre-existent literature.
REFERENCES
1.
A.
Severino
, G.
D’Arrigo
, C.
Buongiorno
, S.
Scalese
, F.
La Via
, and G.
Foti
, J. Appl. Phys.
102
, 023518
(2007
).2.
H.
Nagasawa
and K.
Yagi
, Phys. Status Solidi B
202
, 335
(1997
).3.
A. A.
Lebedev
, P. L.
Abramov
, S. P.
Lebedev
, G. A.
Oganesyan
, A. S.
Tregubova
, and D. V.
Shamshur
, Physica B
404
, 4758
(2009
).4.
H.
Nagasawa
, K.
Yagi
, T.
Kawahara
, N.
Hatta
, and M.
Abe
, Microelectron. Eng.
83
, 185
(2006
).5.
X.
Song
, J. F.
Michaud
, F.
Cayrel
, M.
Zielinski
, M.
Portail
, T.
Chassagne
, E.
Collard
, and D.
Alquier
, Appl. Phys. Lett.
96
, 142104
(2010
).6.
E.
Polychroniadis
, M.
Syvajarvi
, R.
Yakimova
, and J.
Stoemenos
, J. Cryst. Growth
263
, 68
(2004
).7.
X. H.
Zheng
, B.
Qu
, Y. T.
Wang
, Z. Z.
Dai
, J. Y.
Han
, H.
Yang
, and J. W.
Liang
, J. Cryst. Growth
233
, 40
(2001
).8.
A.
Severino
, C.
Frewin
, C.
Bongiorno
, R.
Anzalone
, S. E.
Saddow
, and F.
La Via
, Diamond Relat. Mater.
18
, 1440
(2009
).9.
R.
Anzalone
, C.
Bongiorno
, A.
Severino
, G.
D’Arrigo
, G.
Abbondanza
, G.
Foti
, and F.
La Via
, Appl. Phys. Lett.
92
, 224102
(2008
).10.
S.
Saito
, A.
Hashimoto
, D.
Hasegawa
, and M.
Takahashi
, J. Phys. D: Appl. Phys.
42
, 145007
(2009
).11.
C. C.
Yang
, M. C.
Wu
, C. H.
Lee
, and G. C.
Chi
, J. Appl. Phys.
87
, 4240
(2000
).12.
A.
Munkholm
, C.
Thompson
, C. M.
Foster
, J. A.
Eastman
, O.
Auciello
, G. B.
Stephenson
, P.
Fini
, S. P.
DenBaars
, and J. S.
Speck
, Appl. Phys. Lett.
72
, 2972
(1998
).13.
U.
Pietsch
, H.
Metzger
, S.
Rugel
, B.
Jenichen
, and I. K.
Robinson
, J. Appl. Phys.
74
, 2381
(1993
).14.
J.
Yun
, T.
Takahashi
, T.
Mitani
, Y.
Ishida
, and H.
Okumura
, J. Cryst. Growth
291
, 148
(2006
).© 2010 American Institute of Physics.
2010
American Institute of Physics
You do not currently have access to this content.