Amount of neutral debris emanated from extreme ultraviolet light source must be minimized to maximize its lifetime. Emanation of neutral atomic debris was experimentally investigated using laser-induced-fluorescence technique for carbon dioxide (, in wavelength) and Nd-doped yttrium-aluminum-garnet (Nd:YAG, ) lasers irradiated tin foils. Total number of neutral atomic debris from laser-irradiated tin foils was 1/100 times smaller than that from Nd:YAG irradiated ones. Competitiveness of laser was revealed in terms of debris mitigation.
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