A deterministic design of an ultrahigh Q-factor, wavelength-scale photonic crystal nanobeam cavity is proposed and experimentally demonstrated. Using this approach, cavities with Q>106 and on-resonance transmission T>90% are designed. The devices, fabricated in silicon and capped with a low refractive index polymer, have experimental Q=80000 and T=73%. This is, to the best of our knowledge, the highest transmission measured in deterministically designed, wavelength-scale high-Q cavities.

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