Silica optical microcavities with quality (Q factors above have applications throughout science and engineering. While both the microtoroid and microsphere resonant cavity have demonstrated , only the microsphere has surpassed . Surprisingly, the reason for this performance disparity is directly related to type of silicon substrate used in the fabrication process. In the present work, the theoretical Q of planar toroidal silica resonant cavities is calculated and compared to experimental results from a series of devices fabricated from oxide on doped silicon wafers. As predicted, the Q depends on the substrate dopant concentration.
REFERENCES
1.
J. G.
Zhu
, S. K.
Ozdemir
, Y. F.
Xiao
, L.
Li
, L. N.
He
, D. R.
Chen
, and L.
Yang
, Nat. Photonics
4
, 46
(2010
).2.
A. M.
Armani
, R. P.
Kulkarni
, S. E.
Fraser
, R. C.
Flagan
, and K. J.
Vahala
, Science
317
, 783
(2007
).3.
H. -S.
Choi
, X.
Zhang
, and A. M.
Armani
, Opt. Lett.
35
, 459
(2010
).4.
G.
Anetsberger
, R.
Riviere
, A.
Schliesser
, O.
Arcizet
, and T. J.
Kippenberg
, Nat. Photonics
2
, 627
(2008
).5.
H.
Rokhsari
and K. J.
Vahala
, Phys. Rev. Lett.
92
, 253905
(2004
).6.
M. L.
Gorodetsky
, A. A.
Savchenkov
, and V. S.
Ilchenko
, Opt. Lett.
21
, 453
(1996
).7.
D. W.
Vernooy
, V. S.
Ilchenko
, H.
Mabuchi
, E. W.
Streed
, and H. J.
Kimble
, Opt. Lett.
23
, 247
(1998
).8.
M. L.
Gorodetsky
, A. D.
Pryamikov
, and V. S.
Ilchenko
, J. Opt. Soc. Am. B
17
, 1051
(2000
).9.
J. C.
Knight
, G.
Cheung
, F.
Jacques
, and T. A.
Birks
, Opt. Lett.
22
, 1129
(1997
).10.
G. M.
Hale
and M. R.
Querry
, Appl. Opt.
12
, 555
(1973
).11.
D. K.
Armani
, T. J.
Kippenberg
, S. M.
Spillane
, and K. J.
Vahala
, Nature (London)
421
, 925
(2003
).12.
B. G.
Streetman
and S.
Banerjee
, Solid State Electronic Devices
, 6th ed. (Prentice Hall
, Englewood Cliffs, NJ
, 2005
).13.
R. B.
Fair
, J. Electrochem. Soc.
144
, 708
(1997
).14.
P. G.
Snyder
, M. C.
Rost
, G. H.
Bu-Abbud
, J. A.
Woollam
, and S. A.
Alterovitz
, J. Appl. Phys.
60
, 3293
(1986
).15.
S. M.
Spillane
, T. J.
Kippenberg
, O. J.
Painter
, and K. J.
Vahala
, Phys. Rev. Lett.
91
, 043902
(2003
).16.
D. S.
Weiss
, V.
Sandoghbar
, J.
Hare
, V.
Lefevre-Seguin
, J. -M.
Raimond
, and S.
Haroche
, Opt. Lett.
20
, 1835
(1995
).17.
T. J.
Kippenberg
, S. M.
Spillane
, and K. J.
Vahala
, Opt. Lett.
27
, 1669
(2002
).18.
H. -S.
Hsu
, C.
Cai
, and A. M.
Armani
, Opt. Express
17
, 23265
(2009
).© 2010 American Institute of Physics.
2010
American Institute of Physics
You do not currently have access to this content.