High temperature sensors are of major importance to aerospace and energy related industries. In this letter, a high temperature monolithic compression-mode piezoelectric accelerometer was fabricated using (YCOB) single crystals. The performance of the sensor was tested as function of temperature up to and over a frequency range of 100–600 Hz. The accelerometer prototype was found to possess sensitivity of , across the measured temperature and frequency range, indicating a low temperature coefficient. Furthermore, the sensor exhibited good stability over an extended dwell time at , demonstrating that YCOB piezoelectric accelerometers are promising candidates for high temperature sensing applications.
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American Institute of Physics
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