Purified Si film is prepared directly from metallurgical-grade Si (MG-Si) by using hydrogen plasma induced chemical transport at subatmospheric pressure. The purification mechanism is based on the different hydrogenation behaviors of the various impurity elements in MG-Si. The prepared Si films clearly had fewer typical metal impurities (Fe, Al, Ti, Cr, Mn, etc.) than those in the MG-Si. In particular, the Fe concentration was drastically reduced from 6900 mass ppm to less than 0.1 mass ppm by one time chemical transport. Furthermore, metal impurity concentrations were further reduced by repeating chemical transport deposition.
REFERENCES
1.
G.
Flamant
, V.
Kurtcuoglu
, J.
Murray
, and A.
Steinfeld
, Sol. Energy Mater. Sol. Cells
90
, 2099
(2006
).2.
J.
Degoulange
, I.
Perichaud
, C.
Trassy
, and S.
Martinuzzi
, Sol. Energy Mater. Sol. Cells
92
, 1269
(2008
).3.
Y.
Wan
, P. S.
Raghavan
, C.
Chartier
, J.
Talbott
, and C.
Khattak
, Proceedings of the 2006 IEEE Fourth World Conference on Photovoltaic Energy Conversion
, Waikoloa, HI (IEEE
, Piscataway
, 2006
), p. 1342
.4.
J. C. S.
Pires
, J.
Otubo
, A. F. B.
Baga
, and P. R.
Mei
, J. Mater. Process. Technol.
169
, 16
(2005
).5.
N.
Yuge
, H.
Baba
, Y.
Sakaguchi
, K.
Nishikawa
, H.
Terashita
, and F.
Aratani
, Sol. Energy Mater. Sol. Cells
34
, 243
(1994
).6.
S.
Hegedus
, Prog. Photovolt. Res. Appl.
14
, 393
(2006
).7.
A.
Illiberi
, K.
Sharma
, M.
Creatore
, and M. C. M.
van de Sanden
, Mater. Lett.
63
, 1817
(2009
).8.
I. T.
Martin
, H. M.
Branz
, P.
Stradins
, D. L.
Young
, R. C.
Reedy
, and C. W.
Teplin
, Thin Solid Films
517
, 3496
(2009
).9.
S.
Veprek
, Pure Appl. Chem.
54
, 1197
(1982
).10.
J. V.
Badding
, R. J.
Hemley
, and H. K.
Mao
, Science
253
, 421
(1991
).11.
C.
Borchers
, T. I.
Khomenko
, A. V.
Lenov
, and O. S.
Morozova
, Thermochim. Acta
493
, 80
(2009
).12.
G.
Sandrock
, J.
Reilly
, J.
Graetz
, W. -M.
Zhou
, J.
Johnson
, and J.
Wegrzyn
, Appl. Phys. A: Mater. Sci. Process.
80
, 687
(2005
).13.
H.
Ohmi
, H.
Kakiuchi
, Y.
Hamaoka
, and K.
Yasutake
, J. Appl. Phys.
102
, 023302
(2007
).14.
B.
Bartlome
, A.
Feltrin
, and C.
Balif
, Appl. Phys. Lett.
94
, 201501
(2009
).15.
P. W.
Morrison
, Jr. and J. R.
Haigis
, J. Vac. Sci. Technol. A
11
, 490
(1993
).16.
G.
Dingemans
, M. N.
van den Donker
, D.
Hrunski
, A.
Gordijin
, W. M.
Kessels
, and M. C. M.
van de Sanden
, Appl. Phys. Lett.
93
, 111914
(2008
).17.
B. G.
Gribov
and K. V.
Zinov’ev
, Inorg. Mater.
39
, 653
(2003
).© 2009 American Institute of Physics.
2009
American Institute of Physics
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