The uniformity of the properties of array elements was evaluated by statistical analysis of microscopic images of array structures, assuming that the brightness of the array elements correlates quantitatively or qualitatively with a microscopically probed quantity. Derivatives and autocorrelation functions of cumulative frequency distributions of the object brightnesses were used to quantify variations in object properties throughout arrays. Thus, different specimens, the same specimen at different stages of its fabrication or use, and different imaging conditions can be compared systematically. As an example, we analyzed scanning electron micrographs of microrod arrays and calculated the percentage of broken microrods.
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