We investigate the design, fabrication, and experimental characterization of high quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered one-dimensional photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical quality factors as high as . By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a quality factor of nearly . The effect of cavity size on mode frequency and quality factor was simulated and then verified experimentally.
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