Generalized spectroscopic ellipsometry determines the principal monoclinic optical constants of thin films consisting of slanted titanium nanocolumns deposited by glancing angle deposition under 85° incidence and tilted from the surface normal by 47°. Form birefringence measured for wavelengths from 500 to 1000 nm renders the Ti nanocolumns monoclinic absorbing crystals with c-axis along the nanocolumns, b-axis parallel to the film interface, and 67.5° monoclinic angle between the a- and c-axes. The columnar thin film reveals anomalous optical dispersion, extreme birefringence, strong dichroism, and differs completely from bulk titanium. Characteristic bulk interband transitions are absent in the spectral range investigated.

1.
I. J.
Hodgkinson
and
Q. H.
Wu
,
Birefringent Thin Films and Polarizing Elements
(
World Scientific
,
Singapore
,
1998
).
2.
M. M.
Hawkeye
and
M. J.
Brett
,
J. Vac. Sci. Technol. A
25
,
1317
(
2007
).
3.
C.
Buzea
,
K.
Kaminska
,
G.
Beydaghyan
,
T.
Brown
,
C.
Elliott
,
C.
Dean
, and
K.
Robbie
,
J. Vac. Sci. Technol. B
23
,
2545
(
2005
).
4.
M.
Schubert
,
Phys. Rev. B
53
,
4265
(
1996
).
5.
M.
Schubert
,
Thin Solid Films
313–314
,
323
(
1998
).
6.
M.
Schubert
,
Ann. Phys.
15
,
480
(
2006
).
7.
M.
Schubert
and
W.
Dollase
,
Opt. Lett.
27
,
2073
(
2002
).
8.
G.
Beydaghyan
,
C.
Buzea
,
Y.
Chi
,
C.
Elliott
, and
K.
Robbie
,
Appl. Phys. Lett.
87
,
153103
(
2005
).
9.
M.
Dressel
,
B.
Gompf
,
D.
Faltermeier
,
A. K.
Tripathi
,
J.
Pflaum
, and
M.
Schubert
,
Opt. Express
16
,
19770
(
2008
).
10.
Handbook of Ellipsometry
, edited by
H. G.
Tompkins
and
E. A.
Irene
(
Springer
,
Heidelberg
,
2004
).
11.
M.
Schubert
,
Infrared Ellipsometry on Semiconductor Layer Structures
(
Springer
,
Heidelberg
,
2004
).
12.
D.
Schmidt
,
E.
Schubert
, and
M.
Schubert
,
Phys. Status Solidi A
205
,
748
(
2008
).
13.
I. -H.
Suh
,
Y. -S.
Park
, and
J. -G.
Kim
,
J. Appl. Crystallogr.
33
,
994
(
2000
).
14.
Handbook of Optical Constants of Solids
, edited by
E. D.
Palik
(
Academic
,
Boston
,
1991
).
15.
S. -H.
Hsu
,
E. -S.
Liu
,
Y. -C.
Chang
,
J. N.
Hilfiker
,
Y. D.
Kim
,
T. J.
Kim
,
C. -J.
Lin
, and
G. -R.
Lin
,
Phys. Status Solidi A
205
,
876
(
2008
).
16.
D. E.
Aspnes
,
Thin Solid Films
89
,
249
(
1982
).
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