The plasma absorption probe is a recently developed tool for efficient determination of electron densities of low temperature plasmas. The occurrence of multiple absorption signals was a serious drawback for interpretation of the probe data. To remedy this drawback, a spherically symmetric design of an absorption probe is proposed. A spherical probe is tested in experiment and simulation and the suppression of the multiple absorption signals is demonstrated. The proof of principle for the concept is given.
REFERENCES
1.
M. A.
Lieberman
and A. J.
Lichtenberg
, Principles of Plasma Discharges and Material Processing
(Wiley
, New York
, 2005
).2.
T.
Makabe
and Z.
Petrović
, Plasma Electronics: Applications in Microelectronic Device Fabrication
(CRC
, Boca Raton
, 2006
).3.
H.
Kokura
, K.
Nakamura
, P.
Ghanashev
, and H.
Sugai
, Jpn. J. Appl. Phys., Part 1
38
, 5262
(1999
).4.
C.
Scharwitz
, M.
Böke
, S.-H.
Hong
, and J.
Winter
, Plasma Processes Polym.
4
, 605
(2007
).5.
C.
Scharwitz
, M.
Böke
, and J.
Winter
, “Optimised plasma absorption probe for the electron density determination in reactive plasmas
,” Plasma Processes Polym.
(in press).6.
R. B.
Piejak
, J.
Al-Kuzee
, and N. St. J.
Braithwaite
, Plasma Sources Sci. Technol.
14
, 734
(2005
).7.
D. D.
Blackwell
, D. N.
Walker
, and W. E.
Amatucci
, Rev. Sci. Instrum.
76
, 023503
(2005
).8.
C. T.
Steigies
, D.
Block
, M.
Hirt
, B.
Hipp
, A.
Piel
, and J.
Grygorczuk
, J. Phys. D
33
, 405
(2000
).9.
S.
Dine
, J.-P.
Booth
, G. A.
Curley
, C. S.
Corr
, J.
Jolly
, and J.
Guillon
, Plasma Sources Sci. Technol.
14
, 777
(2005
).10.
M.
Lapke
, T.
Mussenbrock
, R. P.
Brinkmann
, C.
Scharwitz
, M.
Böke
, and J.
Winter
, Appl. Phys. Lett.
90
, 121502
(2007
).11.
M.
Lapke
, T.
Mussenbrock
, and R. P.
Brinkmann
, Appl. Phys. Lett.
93
, 051502
(2008
).12.
T.
Mussenbrock
, T.
Hemke
, D.
Ziegler
, R. P.
Brinkmann
, and M.
Klick
, Plasma Sources Sci. Technol.
17
, 02518
(2008
).13.
© 2009 American Institute of Physics.
2009
American Institute of Physics
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