Excitation of Al/Al2O3 microplasma devices with 50μs, 800 V pulses produces, in Ar/H2 gas mixtures at 600 Torr, 6A current pulses with a duration of 30ns. Corresponding to peak current and power densities of 104A/cm2 and 2.5GW/cm3, respectively, these pulses are generated in a 10μs burst in which the voltage self-pulses at a repetition frequency of 3MHz. Analysis of the Hα, Hβ, and ArII emission line profiles yields a plasma density of 1017cm3, and the emission of OIV ions suggests the presence of energetic electrons. Images of the microplasma indicate that the plasma is initiated by surface flashover and extends 200μm outside the microcavity.

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