Electrical characteristics of metal-insulator-metal capacitors with various nanolaminates are investigated. The results indicate that the breakdown field decreases with increasing the individual-layer (IL) thickness. Concerning the same dielectric composition, the insulator with a thinner IL also exhibits a significant improvement in the electrical breakdown and leakage characteristics. This is attributed to enhanced crystallization of the thicker ILs. The insulator with alternate and exhibits a breakdown field of at , and a leakage current of at and . Further, it is revealed that the conduction mechanism in the high field range is dominated by the Poole–Frenkel emission with intrinsic trap energy of .
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