The spatio-temporal electron density oscillation in a narrow gap dual frequency (27.12 and 1.937 MHz) capacitive discharge has been measured for the first time by using a floating microwave hairpin resonance probe. By measuring the probe’s resonance frequency in a space and phase-resolved manner, we observe significant oscillation in electron density at both drive frequencies throughout the region between the parallel plate electrodes. The observed phenomenon is attributed to the influence of presheath electric fields of the opposing electrodes in alternate fashion.
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Research Article| August 18 2008
Direct measurement of spatial electron density oscillations in a dual frequency capacitive plasma
S. K. Karkari;
A. R. Ellingboe;
S. K. Karkari, A. R. Ellingboe, C. Gaman; Direct measurement of spatial electron density oscillations in a dual frequency capacitive plasma. Appl. Phys. Lett. 18 August 2008; 93 (7): 071501. https://doi.org/10.1063/1.2971236
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