The spatio-temporal electron density oscillation in a narrow gap dual frequency (27.12 and 1.937 MHz) capacitive discharge has been measured for the first time by using a floating microwave hairpin resonance probe. By measuring the probe’s resonance frequency in a space and phase-resolved manner, we observe significant oscillation in electron density at both drive frequencies throughout the region between the parallel plate electrodes. The observed phenomenon is attributed to the influence of presheath electric fields of the opposing electrodes in alternate fashion.
REFERENCES
1.
P. C.
Boyle
, A. R.
Ellingboe
, and M. M.
Turner
, J. Phys. D
37
, 697
(2004
).2.
P. C.
Boyle
, A. R.
Ellingboe
, and M. M.
Turner
, Plasma Sources Sci. Technol.
13
, 493
(2004
).3.
J.
Robiche
, P. C.
Boyle
, M. M.
Turner
, and A. R.
Ellingboe
, J. Phys. D
36
, 1810
(2003
).4.
H. C.
Kim
and J. K.
Lee
, Phys. Rev. Lett.
93
, 085003
(2004
).5.
H. C.
Kim
, J. K.
Lee
, and J. W.
Shon
, Phys. Plasmas
12
, 053501
(2005
).6.
H. C.
Kim
and J. K.
Lee
, J. Vac. Sci. Technol. A
23
, 651
(2005
).7.
M. M.
Turner
and P.
Chabert
, Phys. Rev. Lett.
96
, 205001
(2006
).8.
Exelan®: Donated to Dublin City University by Lam Research Inc.
9.
G.
Gozadinos
, M. M.
Turner
, and D.
Vender
, Phys. Rev. Lett.
87
, 135004
(2001
).10.
P. C.
Boyle
, Ph.D Thesis, Dublin City University
(2004
).11.
S. K.
Karkari
and A. R.
Ellingboe
, Appl. Phys. Lett.
88
, 101501
(2006
).12.
T.
Gans
, J.
Schulze
, D.
O’Connell
, U.
Czarnetzki
, R.
Faulkner
, A. R.
Ellingboe
, and M. M.
Turner
, Appl. Phys. Lett.
89
, 261502
(2006
).13.
J.
Schulze
, T.
Gans
, D.
O’Connell
, U.
Czarnetzki
, A. R.
Ellingboe
, and M. M.
Turner
, J. Phys. D: Appl. Phys.
40
, 7008
(2007
).14.
S. K.
Karkari
, A. R.
Ellingboe
, C.
Gaman
, I.
Swindells
, and J. W.
Bradley
, Meas. Sci. Technol.
18
, 2649
(2007
).15.
R. B.
Piejak
, V. A.
Godyak
, R.
Garner
, B. M.
Alexandrovich
, and N.
Sternberg
, J. Appl. Phys.
95
, 3785
(2004
).© 2008 American Institute of Physics.
2008
American Institute of Physics
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