We combine Kelvin probe force microscopy and current-voltage measurements in order to characterize silicon-on-insulator bioFETs. The measurements were conducted on monolayer of (3-aminopropyl)-trimethoxysilane, which was deposited on ozone activated silicon oxide surface covering the transistor channel. The work function of the modified surface decreased by more than , and the threshold voltage measured on the same devices showed a very large increase following the chemical modification. A detailed analysis enables us to distinguish between electron affinity and field effects in such devices, and in molecular gated transistors in general.
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