The nature of the defects present at the Ge/oxide interface has been investigated by electrically detected magnetic resonance spectroscopy. In vacuo atomic oxygen exposure has been exploited to generate germanium oxide with variable composition according to the oxidation temperature. Two different kinds of interfacial defects have been identified, which correspond to the Ge dangling bonds and to an oxygen-related defect.
REFERENCES
1.
Y.
Kamata
, Mater. Today
11
, 30
(2008
).2.
A.
Dimoulas
, G.
Vellianitis
, G.
Mavrou
, E. K.
Evangelou
, and A.
Sotiropoulos
, Appl. Phys. Lett.
86
, 032908
(2005
).3.
A.
Delabie
, F.
Bellenger
, M.
Houssa
, T.
Conard
, S.
Van Elshocht
, M.
Caymax
, M.
Heyns
, and M.
Meuris
, Appl. Phys. Lett.
91
, 082904
(2007
).4.
H.
Matsubara
, T.
Sasada
, M.
Takenaka
, and S.
Takagi
, Appl. Phys. Lett.
93
, 032104
(2008
).5.
J. R.
Weber
, A.
Janotti
, P.
Rinke
, and C. G.
Van de Walle
, Appl. Phys. Lett.
91
, 142101
(2007
).6.
G.
Pourtois
, M.
Houssa
, A.
Delabie
, T.
Conard
, M.
Caymax
, M.
Meuris
, and M. M.
Heyns
, Appl. Phys. Lett.
92
, 032105
(2008
).7.
P.
Broqvist
, A.
Alkauskas
, and A.
Pasquarello
, Phys. Rev. B
78
, 075203
(2008
).8.
M.
Houssa
, G.
Pourtois
, M.
Caymax
, M.
Meuris
, M. M.
Heyns
, V. V.
Afanas’ev
, and A.
Stesmans
, Appl. Phys. Lett.
93
, 161909
(2008
).9.
A.
Molle
, Md. N. K.
Bhuiyan
, G.
Tallarida
, and M.
Fanciulli
, Appl. Phys. Lett.
89
, 083504
(2006
).10.
D. J.
Lepine
, Phys. Rev. B
6
, 436
(1972
).11.
M.
Fanciulli
, O.
Costa
, S.
Baldovino
, S.
Cocco
, G.
Seguini
, E.
Prati
, and G.
Scarel
, Defects in High-
Gate Dielectric Stacks, NATO Advanced Studies Institute, Series II: Mathematics, Physics and Chemistry
Vol. 220
(Plenum
, New York
, 2005
), p. 26
, and references therein.12.
S.
Lebib
, M.
Schoisswohl
, J. L.
Cantin
, and H. J.
von Bardeleben
, Thin Solid Films
294
, 242
(1997
).13.
F. J.
Himpsel
, F. R.
McFeely
, A.
Taleb-Ibrahimi
, J. A.
Jarmoff
, and G.
Hollinger
, Phys. Rev. B
38
, 6084
(1988
).14.
W.
Shockley
and W. T.
Read
, Jr., Phys. Rev.
87
, 835
(1952
).15.
F.
Callens
, P.
Clauws
, P.
Matthys
, E.
Besman
, and J.
Vennik
, Phys. Rev. B
39
, 11175
(1989
).16.
G.
Feher
, D. K.
Wilson
, and E. A.
Gere
, Phys. Rev. Lett.
3
, 25
(1959
).17.
R. E.
Pontinen
and T. M.
Sanders
, Phys. Rev. Lett.
5
, 311
(1960
).18.
F. C.
Marques
, M. M.
de Lima
, Jr., and P. C.
Taylor
, Appl. Phys. Lett.
74
, 3797
(1999
).19.
L. M.
Roth
and B.
Lax
, Phys. Rev. Lett.
3
, 217
(1959
).20.
T.
Graf
, T.
Ishikawa
, K. M.
Itoh
, E. E.
Haller
, M.
Stutzmann
, and M. S.
Brandt
, Phys. Rev. B
68
, 205208
(2003
).21.
A.
Stirling
, A.
Pasquarello
, J. -C.
Charlier
, and R.
Car
, Phys. Rev. Lett.
85
, 2773
(2000
).22.
V. V.
Afanas’ev
, Y. G.
Fedorenko
, and A.
Stesmans
, Appl. Phys. Lett.
87
, 032107
(2005
).23.
T.
Tsai
, D. L.
Griscom
, and E. J.
Friebele
, J. Appl. Phys.
62
, 2264
(1987
).© 2008 American Institute of Physics.
2008
American Institute of Physics
You do not currently have access to this content.
