The structural and chemical details of GeO2Ge layers grown on In0.15Ga0.85As substrates by molecular beam deposition were studied in situ by diffraction and spectroscopic techniques. The formation of semiconductor-oxygen bonds at the GeIn0.15Ga0.85As interface, which may play a decisive role in dictating the quality of the Ge passivation, was assessed after using two different surface preparations, namely Ar sputtering and atomic hydrogen cleaning.

1.
B. H.
Lee
,
J.
Oh
,
H. H.
Tseng
,
R.
Jammy
, and
H.
Huff
,
Mater. Today
9
,
32
(
2006
).
2.
H.-L.
Lu
,
L.
Sun
,
S.-J.
Ding
,
M.
Xu
,
D. W.
Zhang
, and
L.-K.
Wang
,
Appl. Phys. Lett.
89
,
152910
(
2006
).
3.
E.
O’Connor
,
R. D.
Long
,
K.
Cherkaoui
,
K. K.
Thomas
,
F.
Chalvet
,
I. M.
Povey
,
M. E.
Pemble
,
P. K.
Hurley
,
B.
Brennan
,
G.
Hughes
, and
S. B.
Newcomb
,
Appl. Phys. Lett.
92
,
022902
(
2008
).
4.
P. R.
Droopad
,
K.
Rajagopalan
,
J.
Abrokwah
,
L.
Adams
,
N.
England
,
D.
Uebelhoer
,
P.
Fejes
, and
P.
Zurcher
,
J. Cryst. Growth
301
,
139
(
2007
).
5.
M. L.
Huang
,
Y. C.
Chang
,
C. H.
Chang
,
Y. J.
Lee
,
P.
Chang
,
J.
Kwo
,
T. B.
Wu
, and
M.
Hong
,
Appl. Phys. Lett.
87
,
252104
(
2005
).
6.
C.-H.
Chang
,
Y.-K.
Chou
,
Y.-C.
Chang
,
K.-Y.
Lee
,
T.-D.
Lin
,
T.-B.
Wu
,
M.
Hong
, and
J.
Kwo
,
Appl. Phys. Lett.
89
,
242911
(
2006
).
7.
I.
Ok
,
H.
Kim
,
M.
Zhang
,
F.
Zhu
,
S.
Park
,
J.
Yum
,
H.
Zhao
, and
J. C.
Lee
,
Appl. Phys. Lett.
92
,
202903
(
2008
).
8.
S.
Oktyabrsky
,
V.
Tokranov
,
M.
Yakimov
,
R.
Moore
,
S.
Koveshnikov
,
W.
Tsai
,
F.
Zhu
, and
J. C.
Lee
,
Mater. Sci. Eng., B
135
,
272
(
2006
).
9.
H. S.
Kim
,
Appl. Phys. Lett.
91
,
042904
(
2007
).
10.
P.
Kruse
,
J. G.
McLean
, and
A. C.
Kummel
,
J. Chem. Phys.
113
,
9224
(
2000
).
11.
A.
Delabie
,
F.
Bellenger
,
M.
Houssa
,
T.
Conard
,
S.
Van Elchocht
,
M.
Caymax
,
M.
Heyns
, and
M.
Meuris
,
Appl. Phys. Lett.
91
,
082904
(
2007
).
12.
J. J.
Kolodzieij
,
B.
Such
, and
M.
Szymonski
,
Phys. Rev. B
71
,
165419
(
2005
).
13.
A.
Khatiri
,
J. M.
Ripalda
,
T. J.
Krzyzewski
,
G. R.
Bell
,
C. F.
McConville
, and
T. S.
Jones
,
Surf. Sci.
548
,
L1
(
2004
).
14.
F. S.
Aguirre-Tostado
,
M.
Milojevic
,
C. L.
Hinkle
,
E. M.
Vogel
,
R. M.
Wallace
,
S.
McDonnell
, and
G. J.
Hughes
,
Appl. Phys. Lett.
92
,
171906
(
2008
).
15.
P.
Tomkiewicz
,
A.
Winkler
, and
J.
Szuber
,
Appl. Surf. Sci.
252
,
7647
(
2006
).
16.
J. P.
de Souza
,
E.
Kiewra
,
Y.
Sun
,
A.
Callegari
,
D. K.
Sadana
,
G.
Shahidi
,
D. J.
Webb
,
J.
Fompeyrine
,
R.
Germann
,
C.
Rossel
, and
C.
Marchiori
,
Appl. Phys. Lett.
92
,
153508
(
2008
).
17.
A.
Molle
,
Md.
Nurul Kabir Bhuiyan
,
G.
Tallarida
, and
M.
Fanciulli
,
Appl. Phys. Lett.
89
,
083504
(
2006
).
18.
A.
Ichimiya
and
P. I.
Cohen
,
Reflection High Energy Electron Diffraction
, (
Cambridge University Press
,
Cambridge
,
2004
).
19.
X.-S.
Wang
,
K. W.
Self
, and
W. H.
Weinberg
,
J. Vac. Sci. Technol. A
12
,
1920
(
1993
).
20.
H. H.
Brongersma
,
M.
Draxler
,
M.
de Ridder
, and
P.
Bauer
,
Surf. Sci. Rep.
62
,
63
(
2007
).
21.

From the Tanuma–Powell–Penn formula (www.nist.gov/srd/nist71.htm), the inelastic mean free paths for Ga 3d and As 3d photoelectrons are 2.7 and 2.4nm, thus allowing the interface diagnostic of the GeO2GeIn0.15Ga0.85As samples.

22.

From NIST Database (http://srdata.nist.gov/xps/) the doublet separation were set as 0.86eV for In 4d, 0.44eV for Ga 3d, 0.58eV for Ge 3d, 0.67eV for As 3d.

23.
S. C.
Gosh
,
M. C.
Biesinger
,
R. R.
LaPierre
, and
P.
Kruse
,
J. Appl. Phys.
101
,
114322
(
2007
).
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