The authors investigate the phenomena affecting lateral spatial resolution (LSR) and aspect ratio (AR) in multiphoton polymerization (MPP) nanofabrication. A LSR of and an AR of 1.38 were achieved for photocured polymer lines on the surface of a substrate by continuing scanning mode. Theoretical analysis based on the distribution of light intensity in this setup indicates that the LSR could be improved to better than . The asymmetric shrinkage of voxel in the axial and lateral directions has a significant impact for obtaining features of low AR, which are a critical requirement for construction of micro/nanodevices by MPP nanofabrication.
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© 2008 American Institute of Physics.
2008
American Institute of Physics
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