We present scanning thermal microscopy (SThM) measurements on a sample consisting of regions of thick film and thick on a silicon substrate. The experiments were preformed in high vacuum conditions using microfabricated silicon cantilevers with sharp heatable tips, facilitating the unprecedented achievement of a lateral SThM image resolution of . In addition, the heat transfer through the tip to the sample was investigated using approach curves and used to determine the thermal conductivity of the thick layer.
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