The detection of self-formed inclusions in hydrogenated carbon (C:H) with fullerenelike (FL) structure is reported. This material is synthesized by bias-enhanced electron cyclotron resonance chemical vapor deposition at low substrate temperatures . The FL structure is identified by high-resolution transmission electron microscopy whereas the presence of inclusions is derived from spectral signatures in the x-ray absorption near edge structure. The formation of FL-C:H takes place for negative bias voltages higher than , in parallel with dehydrogenation and drastic improvement of the tribomechanical film properties.
Direct spectroscopic evidence of self-formed inclusions in fullerenelike hydrogenated carbon films
J. G. Buijnsters, M. Camero, R. Gago, A. R. Landa-Canovas, C. Gómez-Aleixandre, I. Jiménez; Direct spectroscopic evidence of self-formed inclusions in fullerenelike hydrogenated carbon films. Appl. Phys. Lett. 7 April 2008; 92 (14): 141920. https://doi.org/10.1063/1.2903502
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