The detection of self-formed C60 inclusions in hydrogenated carbon (C:H) with fullerenelike (FL) structure is reported. This material is synthesized by bias-enhanced electron cyclotron resonance chemical vapor deposition at low substrate temperatures (<120°C). The FL structure is identified by high-resolution transmission electron microscopy whereas the presence of C60 inclusions is derived from spectral signatures in the C(1s) x-ray absorption near edge structure. The formation of FL-C:H takes place for negative bias voltages higher than 100V, in parallel with dehydrogenation and drastic improvement of the tribomechanical film properties.

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