A bidirectional linear microactuator with a stator less than , fulfilling Feynman’s original criteria for a motor less than of an inch on a side [R. Feynman, Engineering and Science Magazine (Caltech) 4, 23 (1960)], is shown to generate forces over in either direction at speeds of up to using a large polished alumina slider. Using the thickness mode of a stepped piezoelectric block in conjunction with a pair of fundamental flexural modes of a pair of slanted beams—each slightly differs in configuration—gives the ability to generate silent bidirectional motion at an excitation frequency of about . In addition to offering forces at least one order of magnitude larger than those of the other methods, the system also serves as a platform for studying nonlinear frictional phenomena on the nanoscale and its manipulation through acoustic irradiation of the contact interface for propulsion.
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7 January 2008
Research Article|
January 11 2008
Piezoelectric ultrasonic bidirectional linear actuator for micropositioning fulfilling Feynman’s criteria
James Friend;
Leslie Yeo;
Leslie Yeo
Micro/Nanophysics Laboratory,
Monash University
,b) Wellington Road, Clayton, Victoria 3800, Australia
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Appl. Phys. Lett. 92, 014107 (2008)
Article history
Received:
August 30 2007
Accepted:
October 20 2007
Citation
James Friend, Leslie Yeo, Matt Hogg; Piezoelectric ultrasonic bidirectional linear actuator for micropositioning fulfilling Feynman’s criteria. Appl. Phys. Lett. 7 January 2008; 92 (1): 014107. https://doi.org/10.1063/1.2814044
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