The interaction of hydrogen with InN epitaxial films has been investigated by exposing InN to a remote hydrogen plasma and monitoring changes in the InN optical properties in real time via spectroscopic ellipsometry. Atomic hydrogen reacts swith InN causing nitrogen depletion with formation of indium clusters at the sample surface. After terminating the hydrogenation process, the hydrogen remains stable in the InN host lattice at , while at higher temperatures it partially desorbs as and .
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